4/27/2011	6:52:21 AM	Helium valve closed
4/27/2011	6:52:21 AM	H2 valve closed
4/27/2011	6:52:21 AM	BCl3 valve closed
4/27/2011	6:52:21 AM	PH3 valve closed
4/27/2011	6:52:21 AM	SiCl4 pre valve closed
4/27/2011	6:52:21 AM	SiCl4 post valve closed
4/27/2011	6:52:21 AM	Main Vac valve closed
4/27/2011	6:52:21 AM	Bypass valve closed
4/27/2011	6:52:21 AM	Bubbler valve closed
4/27/2011	6:52:21 AM	Helium MFC set to  0.000000
4/27/2011	6:52:21 AM	H2 MFC set to  0.000000
4/27/2011	6:52:21 AM	BCl3 MFC set to  0.000000
4/27/2011	6:52:21 AM	PHl3 MFC set to  0.000000
4/27/2011	6:52:21 AM	SiCl4 MFC set to  0.000000
4/27/2011	6:52:21 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	6:52:21 AM	Tube furnace set to 0
4/27/2011	6:52:22 AM	Run finished at 6:52 AM
4/27/2011	6:59:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/27/2011	6:59:07 AM	Recipe started at 6:59 AM
4/27/2011	6:59:07 AM	Helium valve closed
4/27/2011	6:59:07 AM	H2 valve closed
4/27/2011	6:59:07 AM	BCl3 valve closed
4/27/2011	6:59:07 AM	PH3 valve closed
4/27/2011	6:59:07 AM	SiCl4 pre valve closed
4/27/2011	6:59:07 AM	SiCl4 post valve closed
4/27/2011	6:59:07 AM	Main Vac valve closed
4/27/2011	6:59:07 AM	Bubbler valve closed
4/27/2011	6:59:07 AM	Bypass valve opened
4/27/2011	6:59:07 AM	Helium MFC set to  0.000000
4/27/2011	6:59:07 AM	H2 MFC set to  0.000000
4/27/2011	6:59:07 AM	BCl3 MFC set to  0.000000
4/27/2011	6:59:07 AM	PHl3 MFC set to  0.000000
4/27/2011	6:59:07 AM	SiCl4 MFC set to  0.000000
4/27/2011	6:59:07 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	6:59:07 AM	Tube furnace set to 0
4/27/2011	6:59:40 AM	Helium valve closed
4/27/2011	6:59:40 AM	H2 valve closed
4/27/2011	6:59:40 AM	BCl3 valve closed
4/27/2011	6:59:40 AM	PH3 valve closed
4/27/2011	6:59:40 AM	SiCl4 pre valve closed
4/27/2011	6:59:40 AM	SiCl4 post valve closed
4/27/2011	6:59:40 AM	Bubbler valve closed
4/27/2011	6:59:40 AM	Main Vac valve opened
4/27/2011	6:59:40 AM	Bypass valve opened
4/27/2011	6:59:40 AM	Helium MFC set to  0.000000
4/27/2011	6:59:40 AM	H2 MFC set to  0.000000
4/27/2011	6:59:40 AM	BCl3 MFC set to  0.000000
4/27/2011	6:59:40 AM	PHl3 MFC set to  0.000000
4/27/2011	6:59:40 AM	SiCl4 MFC set to  0.000000
4/27/2011	6:59:40 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	6:59:40 AM	Tube furnace set to 0
4/27/2011	6:59:40 AM	Run finished at 6:59 AM
4/27/2011	6:59:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/27/2011	7:00:07 AM	Bypass valve closed
4/27/2011	7:00:08 AM	Main Vac valve closed
4/27/2011	9:41:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/27/2011	9:41:37 AM	Recipe started at 9:41 AM
4/27/2011	9:41:37 AM	H2 valve closed
4/27/2011	9:41:37 AM	BCl3 valve closed
4/27/2011	9:41:37 AM	PH3 valve closed
4/27/2011	9:41:37 AM	SiCl4 pre valve closed
4/27/2011	9:41:37 AM	SiCl4 post valve closed
4/27/2011	9:41:37 AM	Main Vac valve closed
4/27/2011	9:41:37 AM	Bypass valve closed
4/27/2011	9:41:37 AM	Bubbler valve closed
4/27/2011	9:41:37 AM	Helium valve opened
4/27/2011	9:41:37 AM	Helium MFC set to  500.000000
4/27/2011	9:41:37 AM	H2 MFC set to  0.000000
4/27/2011	9:41:37 AM	BCl3 MFC set to  0.000000
4/27/2011	9:41:37 AM	PHl3 MFC set to  0.000000
4/27/2011	9:41:37 AM	SiCl4 MFC set to  0.000000
4/27/2011	9:41:37 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	9:41:38 AM	Tube furnace set to 0
4/27/2011	9:42:56 AM	Helium valve closed
4/27/2011	9:42:56 AM	H2 valve closed
4/27/2011	9:42:56 AM	BCl3 valve closed
4/27/2011	9:42:56 AM	PH3 valve closed
4/27/2011	9:42:56 AM	SiCl4 pre valve closed
4/27/2011	9:42:56 AM	SiCl4 post valve closed
4/27/2011	9:42:56 AM	Main Vac valve closed
4/27/2011	9:42:56 AM	Bypass valve closed
4/27/2011	9:42:56 AM	Bubbler valve closed
4/27/2011	9:42:56 AM	Helium MFC set to  0.000000
4/27/2011	9:42:56 AM	H2 MFC set to  0.000000
4/27/2011	9:42:56 AM	BCl3 MFC set to  0.000000
4/27/2011	9:42:56 AM	PHl3 MFC set to  0.000000
4/27/2011	9:42:56 AM	SiCl4 MFC set to  0.000000
4/27/2011	9:42:56 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	9:42:57 AM	Tube furnace set to 0
4/27/2011	9:42:57 AM	Run finished at 9:42 AM
4/27/2011	9:42:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/27/2011	9:45:01 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/27/2011	9:45:14 AM	Recipe started at 9:45 AM
4/27/2011	9:45:14 AM	Helium valve closed
4/27/2011	9:45:14 AM	H2 valve closed
4/27/2011	9:45:14 AM	BCl3 valve closed
4/27/2011	9:45:14 AM	PH3 valve closed
4/27/2011	9:45:14 AM	SiCl4 pre valve closed
4/27/2011	9:45:14 AM	SiCl4 post valve closed
4/27/2011	9:45:14 AM	Main Vac valve closed
4/27/2011	9:45:14 AM	Bubbler valve closed
4/27/2011	9:45:14 AM	Bypass valve opened
4/27/2011	9:45:14 AM	Helium MFC set to  0.000000
4/27/2011	9:45:14 AM	H2 MFC set to  0.000000
4/27/2011	9:45:14 AM	BCl3 MFC set to  0.000000
4/27/2011	9:45:14 AM	PHl3 MFC set to  0.000000
4/27/2011	9:45:14 AM	SiCl4 MFC set to  0.000000
4/27/2011	9:45:14 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	9:45:14 AM	Tube furnace set to 0
4/27/2011	9:45:45 AM	Helium valve closed
4/27/2011	9:45:45 AM	H2 valve closed
4/27/2011	9:45:45 AM	BCl3 valve closed
4/27/2011	9:45:45 AM	PH3 valve closed
4/27/2011	9:45:45 AM	SiCl4 pre valve closed
4/27/2011	9:45:45 AM	SiCl4 post valve closed
4/27/2011	9:45:45 AM	Bubbler valve closed
4/27/2011	9:45:45 AM	Main Vac valve opened
4/27/2011	9:45:45 AM	Bypass valve opened
4/27/2011	9:45:45 AM	Helium MFC set to  0.000000
4/27/2011	9:45:45 AM	H2 MFC set to  0.000000
4/27/2011	9:45:45 AM	BCl3 MFC set to  0.000000
4/27/2011	9:45:45 AM	PHl3 MFC set to  0.000000
4/27/2011	9:45:45 AM	SiCl4 MFC set to  0.000000
4/27/2011	9:45:45 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	9:45:46 AM	Tube furnace set to 0
4/27/2011	9:46:46 AM	H2 valve closed
4/27/2011	9:46:46 AM	BCl3 valve closed
4/27/2011	9:46:46 AM	PH3 valve closed
4/27/2011	9:46:46 AM	SiCl4 pre valve closed
4/27/2011	9:46:46 AM	SiCl4 post valve closed
4/27/2011	9:46:46 AM	Bubbler valve closed
4/27/2011	9:46:46 AM	Helium valve opened
4/27/2011	9:46:46 AM	Main Vac valve opened
4/27/2011	9:46:46 AM	Bypass valve opened
4/27/2011	9:46:46 AM	Helium MFC set to  100.000000
4/27/2011	9:46:46 AM	H2 MFC set to  0.000000
4/27/2011	9:46:46 AM	BCl3 MFC set to  0.000000
4/27/2011	9:46:46 AM	PHl3 MFC set to  0.000000
4/27/2011	9:46:46 AM	SiCl4 MFC set to  0.000000
4/27/2011	9:46:46 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	9:46:46 AM	Tube furnace set to 0
4/27/2011	9:47:46 AM	Helium valve closed
4/27/2011	9:47:46 AM	H2 valve closed
4/27/2011	9:47:46 AM	BCl3 valve closed
4/27/2011	9:47:46 AM	PH3 valve closed
4/27/2011	9:47:46 AM	SiCl4 pre valve closed
4/27/2011	9:47:46 AM	SiCl4 post valve closed
4/27/2011	9:47:46 AM	Bubbler valve closed
4/27/2011	9:47:46 AM	Main Vac valve opened
4/27/2011	9:47:46 AM	Bypass valve opened
4/27/2011	9:47:46 AM	Helium MFC set to  0.000000
4/27/2011	9:47:46 AM	H2 MFC set to  0.000000
4/27/2011	9:47:46 AM	BCl3 MFC set to  0.000000
4/27/2011	9:47:46 AM	PHl3 MFC set to  0.000000
4/27/2011	9:47:46 AM	SiCl4 MFC set to  0.000000
4/27/2011	9:47:46 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	9:47:46 AM	Tube furnace set to 0
4/27/2011	9:48:46 AM	H2 valve closed
4/27/2011	9:48:46 AM	BCl3 valve closed
4/27/2011	9:48:46 AM	PH3 valve closed
4/27/2011	9:48:46 AM	SiCl4 pre valve closed
4/27/2011	9:48:46 AM	SiCl4 post valve closed
4/27/2011	9:48:46 AM	Bubbler valve closed
4/27/2011	9:48:46 AM	Helium valve opened
4/27/2011	9:48:46 AM	Main Vac valve opened
4/27/2011	9:48:46 AM	Bypass valve opened
4/27/2011	9:48:46 AM	Helium MFC set to  100.000000
4/27/2011	9:48:46 AM	H2 MFC set to  0.000000
4/27/2011	9:48:46 AM	BCl3 MFC set to  0.000000
4/27/2011	9:48:46 AM	PHl3 MFC set to  0.000000
4/27/2011	9:48:46 AM	SiCl4 MFC set to  0.000000
4/27/2011	9:48:46 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	9:48:46 AM	Tube furnace set to 0
4/27/2011	9:49:46 AM	Helium valve closed
4/27/2011	9:49:46 AM	H2 valve closed
4/27/2011	9:49:46 AM	BCl3 valve closed
4/27/2011	9:49:46 AM	PH3 valve closed
4/27/2011	9:49:46 AM	SiCl4 pre valve closed
4/27/2011	9:49:46 AM	SiCl4 post valve closed
4/27/2011	9:49:46 AM	Bubbler valve closed
4/27/2011	9:49:46 AM	Main Vac valve opened
4/27/2011	9:49:46 AM	Bypass valve opened
4/27/2011	9:49:46 AM	Helium MFC set to  0.000000
4/27/2011	9:49:46 AM	H2 MFC set to  0.000000
4/27/2011	9:49:46 AM	BCl3 MFC set to  0.000000
4/27/2011	9:49:46 AM	PHl3 MFC set to  0.000000
4/27/2011	9:49:46 AM	SiCl4 MFC set to  0.000000
4/27/2011	9:49:46 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	9:49:46 AM	Tube furnace set to 0
4/27/2011	9:50:46 AM	H2 valve closed
4/27/2011	9:50:46 AM	BCl3 valve closed
4/27/2011	9:50:46 AM	PH3 valve closed
4/27/2011	9:50:46 AM	SiCl4 pre valve closed
4/27/2011	9:50:46 AM	SiCl4 post valve closed
4/27/2011	9:50:46 AM	Bubbler valve closed
4/27/2011	9:50:46 AM	Helium valve opened
4/27/2011	9:50:46 AM	Main Vac valve opened
4/27/2011	9:50:46 AM	Bypass valve opened
4/27/2011	9:50:46 AM	Helium MFC set to  100.000000
4/27/2011	9:50:46 AM	H2 MFC set to  0.000000
4/27/2011	9:50:46 AM	BCl3 MFC set to  0.000000
4/27/2011	9:50:46 AM	PHl3 MFC set to  0.000000
4/27/2011	9:50:46 AM	SiCl4 MFC set to  0.000000
4/27/2011	9:50:46 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	9:50:47 AM	Tube furnace set to 0
4/27/2011	9:51:47 AM	Helium valve closed
4/27/2011	9:51:47 AM	H2 valve closed
4/27/2011	9:51:47 AM	BCl3 valve closed
4/27/2011	9:51:47 AM	PH3 valve closed
4/27/2011	9:51:47 AM	SiCl4 pre valve closed
4/27/2011	9:51:47 AM	SiCl4 post valve closed
4/27/2011	9:51:47 AM	Bubbler valve closed
4/27/2011	9:51:47 AM	Main Vac valve opened
4/27/2011	9:51:47 AM	Bypass valve opened
4/27/2011	9:51:47 AM	Helium MFC set to  0.000000
4/27/2011	9:51:47 AM	H2 MFC set to  0.000000
4/27/2011	9:51:47 AM	BCl3 MFC set to  0.000000
4/27/2011	9:51:47 AM	PHl3 MFC set to  0.000000
4/27/2011	9:51:47 AM	SiCl4 MFC set to  0.000000
4/27/2011	9:51:47 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	9:51:47 AM	Tube furnace set to 0
4/27/2011	9:52:47 AM	H2 valve closed
4/27/2011	9:52:47 AM	BCl3 valve closed
4/27/2011	9:52:47 AM	PH3 valve closed
4/27/2011	9:52:47 AM	SiCl4 pre valve closed
4/27/2011	9:52:47 AM	SiCl4 post valve closed
4/27/2011	9:52:47 AM	Bubbler valve closed
4/27/2011	9:52:47 AM	Helium valve opened
4/27/2011	9:52:47 AM	Main Vac valve opened
4/27/2011	9:52:47 AM	Bypass valve opened
4/27/2011	9:52:47 AM	Helium MFC set to  100.000000
4/27/2011	9:52:47 AM	H2 MFC set to  0.000000
4/27/2011	9:52:47 AM	BCl3 MFC set to  0.000000
4/27/2011	9:52:47 AM	PHl3 MFC set to  0.000000
4/27/2011	9:52:47 AM	SiCl4 MFC set to  0.000000
4/27/2011	9:52:47 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	9:52:47 AM	Tube furnace set to 0
4/27/2011	9:53:47 AM	Helium valve closed
4/27/2011	9:53:47 AM	H2 valve closed
4/27/2011	9:53:47 AM	BCl3 valve closed
4/27/2011	9:53:47 AM	PH3 valve closed
4/27/2011	9:53:47 AM	SiCl4 pre valve closed
4/27/2011	9:53:47 AM	SiCl4 post valve closed
4/27/2011	9:53:47 AM	Bubbler valve closed
4/27/2011	9:53:47 AM	Main Vac valve opened
4/27/2011	9:53:47 AM	Bypass valve opened
4/27/2011	9:53:47 AM	Helium MFC set to  0.000000
4/27/2011	9:53:47 AM	H2 MFC set to  0.000000
4/27/2011	9:53:47 AM	BCl3 MFC set to  0.000000
4/27/2011	9:53:47 AM	PHl3 MFC set to  0.000000
4/27/2011	9:53:47 AM	SiCl4 MFC set to  0.000000
4/27/2011	9:53:47 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	9:53:47 AM	Tube furnace set to 0
4/27/2011	9:54:47 AM	H2 valve closed
4/27/2011	9:54:47 AM	BCl3 valve closed
4/27/2011	9:54:47 AM	PH3 valve closed
4/27/2011	9:54:47 AM	SiCl4 pre valve closed
4/27/2011	9:54:47 AM	SiCl4 post valve closed
4/27/2011	9:54:47 AM	Bubbler valve closed
4/27/2011	9:54:47 AM	Helium valve opened
4/27/2011	9:54:47 AM	Main Vac valve opened
4/27/2011	9:54:47 AM	Bypass valve opened
4/27/2011	9:54:47 AM	Helium MFC set to  100.000000
4/27/2011	9:54:47 AM	H2 MFC set to  0.000000
4/27/2011	9:54:47 AM	BCl3 MFC set to  0.000000
4/27/2011	9:54:47 AM	PHl3 MFC set to  0.000000
4/27/2011	9:54:47 AM	SiCl4 MFC set to  0.000000
4/27/2011	9:54:47 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	9:54:47 AM	Tube furnace set to 0
4/27/2011	9:55:47 AM	Helium valve closed
4/27/2011	9:55:47 AM	H2 valve closed
4/27/2011	9:55:47 AM	BCl3 valve closed
4/27/2011	9:55:47 AM	PH3 valve closed
4/27/2011	9:55:47 AM	SiCl4 pre valve closed
4/27/2011	9:55:47 AM	SiCl4 post valve closed
4/27/2011	9:55:47 AM	Bubbler valve closed
4/27/2011	9:55:47 AM	Main Vac valve opened
4/27/2011	9:55:47 AM	Bypass valve opened
4/27/2011	9:55:47 AM	Helium MFC set to  0.000000
4/27/2011	9:55:47 AM	H2 MFC set to  0.000000
4/27/2011	9:55:47 AM	BCl3 MFC set to  0.000000
4/27/2011	9:55:47 AM	PHl3 MFC set to  0.000000
4/27/2011	9:55:47 AM	SiCl4 MFC set to  0.000000
4/27/2011	9:55:47 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	9:55:48 AM	Tube furnace set to 0
4/27/2011	9:56:48 AM	H2 valve closed
4/27/2011	9:56:48 AM	BCl3 valve closed
4/27/2011	9:56:48 AM	PH3 valve closed
4/27/2011	9:56:48 AM	SiCl4 pre valve closed
4/27/2011	9:56:48 AM	SiCl4 post valve closed
4/27/2011	9:56:48 AM	Bubbler valve closed
4/27/2011	9:56:48 AM	Helium valve opened
4/27/2011	9:56:48 AM	Main Vac valve opened
4/27/2011	9:56:48 AM	Bypass valve opened
4/27/2011	9:56:48 AM	Helium MFC set to  100.000000
4/27/2011	9:56:48 AM	H2 MFC set to  0.000000
4/27/2011	9:56:48 AM	BCl3 MFC set to  0.000000
4/27/2011	9:56:48 AM	PHl3 MFC set to  0.000000
4/27/2011	9:56:48 AM	SiCl4 MFC set to  0.000000
4/27/2011	9:56:48 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	9:56:48 AM	Tube furnace set to 0
4/27/2011	9:57:48 AM	Helium valve closed
4/27/2011	9:57:48 AM	H2 valve closed
4/27/2011	9:57:48 AM	BCl3 valve closed
4/27/2011	9:57:48 AM	PH3 valve closed
4/27/2011	9:57:48 AM	SiCl4 pre valve closed
4/27/2011	9:57:48 AM	SiCl4 post valve closed
4/27/2011	9:57:48 AM	Bubbler valve closed
4/27/2011	9:57:48 AM	Main Vac valve opened
4/27/2011	9:57:48 AM	Bypass valve opened
4/27/2011	9:57:48 AM	Helium MFC set to  0.000000
4/27/2011	9:57:48 AM	H2 MFC set to  0.000000
4/27/2011	9:57:48 AM	BCl3 MFC set to  0.000000
4/27/2011	9:57:48 AM	PHl3 MFC set to  0.000000
4/27/2011	9:57:48 AM	SiCl4 MFC set to  0.000000
4/27/2011	9:57:48 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	9:57:48 AM	Tube furnace set to 0
4/27/2011	9:58:48 AM	H2 valve closed
4/27/2011	9:58:48 AM	BCl3 valve closed
4/27/2011	9:58:48 AM	PH3 valve closed
4/27/2011	9:58:48 AM	SiCl4 pre valve closed
4/27/2011	9:58:48 AM	SiCl4 post valve closed
4/27/2011	9:58:48 AM	Bubbler valve closed
4/27/2011	9:58:48 AM	Helium valve opened
4/27/2011	9:58:48 AM	Main Vac valve opened
4/27/2011	9:58:48 AM	Bypass valve opened
4/27/2011	9:58:48 AM	Helium MFC set to  100.000000
4/27/2011	9:58:48 AM	H2 MFC set to  0.000000
4/27/2011	9:58:48 AM	BCl3 MFC set to  0.000000
4/27/2011	9:58:48 AM	PHl3 MFC set to  0.000000
4/27/2011	9:58:48 AM	SiCl4 MFC set to  0.000000
4/27/2011	9:58:48 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	9:58:48 AM	Tube furnace set to 0
4/27/2011	9:59:48 AM	Helium valve closed
4/27/2011	9:59:48 AM	H2 valve closed
4/27/2011	9:59:48 AM	BCl3 valve closed
4/27/2011	9:59:48 AM	PH3 valve closed
4/27/2011	9:59:48 AM	SiCl4 pre valve closed
4/27/2011	9:59:48 AM	SiCl4 post valve closed
4/27/2011	9:59:48 AM	Bubbler valve closed
4/27/2011	9:59:48 AM	Main Vac valve opened
4/27/2011	9:59:48 AM	Bypass valve opened
4/27/2011	9:59:48 AM	Helium MFC set to  0.000000
4/27/2011	9:59:48 AM	H2 MFC set to  0.000000
4/27/2011	9:59:48 AM	BCl3 MFC set to  0.000000
4/27/2011	9:59:48 AM	PHl3 MFC set to  0.000000
4/27/2011	9:59:48 AM	SiCl4 MFC set to  0.000000
4/27/2011	9:59:48 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	9:59:48 AM	Tube furnace set to 0
4/27/2011	10:00:48 AM	H2 valve closed
4/27/2011	10:00:48 AM	BCl3 valve closed
4/27/2011	10:00:48 AM	PH3 valve closed
4/27/2011	10:00:48 AM	SiCl4 pre valve closed
4/27/2011	10:00:48 AM	SiCl4 post valve closed
4/27/2011	10:00:48 AM	Bubbler valve closed
4/27/2011	10:00:48 AM	Helium valve opened
4/27/2011	10:00:48 AM	Main Vac valve opened
4/27/2011	10:00:48 AM	Bypass valve opened
4/27/2011	10:00:48 AM	Helium MFC set to  100.000000
4/27/2011	10:00:48 AM	H2 MFC set to  0.000000
4/27/2011	10:00:48 AM	BCl3 MFC set to  0.000000
4/27/2011	10:00:48 AM	PHl3 MFC set to  0.000000
4/27/2011	10:00:48 AM	SiCl4 MFC set to  0.000000
4/27/2011	10:00:48 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	10:00:49 AM	Tube furnace set to 0
4/27/2011	10:01:49 AM	Helium valve closed
4/27/2011	10:01:49 AM	H2 valve closed
4/27/2011	10:01:49 AM	BCl3 valve closed
4/27/2011	10:01:49 AM	PH3 valve closed
4/27/2011	10:01:49 AM	SiCl4 pre valve closed
4/27/2011	10:01:49 AM	SiCl4 post valve closed
4/27/2011	10:01:49 AM	Bubbler valve closed
4/27/2011	10:01:49 AM	Main Vac valve opened
4/27/2011	10:01:49 AM	Bypass valve opened
4/27/2011	10:01:49 AM	Helium MFC set to  0.000000
4/27/2011	10:01:49 AM	H2 MFC set to  0.000000
4/27/2011	10:01:49 AM	BCl3 MFC set to  0.000000
4/27/2011	10:01:49 AM	PHl3 MFC set to  0.000000
4/27/2011	10:01:49 AM	SiCl4 MFC set to  0.000000
4/27/2011	10:01:49 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	10:01:49 AM	Tube furnace set to 0
4/27/2011	10:02:49 AM	H2 valve closed
4/27/2011	10:02:49 AM	BCl3 valve closed
4/27/2011	10:02:49 AM	PH3 valve closed
4/27/2011	10:02:49 AM	SiCl4 pre valve closed
4/27/2011	10:02:49 AM	SiCl4 post valve closed
4/27/2011	10:02:49 AM	Bubbler valve closed
4/27/2011	10:02:49 AM	Helium valve opened
4/27/2011	10:02:49 AM	Main Vac valve opened
4/27/2011	10:02:49 AM	Bypass valve opened
4/27/2011	10:02:49 AM	Helium MFC set to  100.000000
4/27/2011	10:02:49 AM	H2 MFC set to  0.000000
4/27/2011	10:02:49 AM	BCl3 MFC set to  0.000000
4/27/2011	10:02:49 AM	PHl3 MFC set to  0.000000
4/27/2011	10:02:49 AM	SiCl4 MFC set to  0.000000
4/27/2011	10:02:49 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	10:02:49 AM	Tube furnace set to 0
4/27/2011	10:03:49 AM	Helium valve closed
4/27/2011	10:03:49 AM	H2 valve closed
4/27/2011	10:03:49 AM	BCl3 valve closed
4/27/2011	10:03:49 AM	PH3 valve closed
4/27/2011	10:03:49 AM	SiCl4 pre valve closed
4/27/2011	10:03:49 AM	SiCl4 post valve closed
4/27/2011	10:03:49 AM	Bubbler valve closed
4/27/2011	10:03:49 AM	Main Vac valve opened
4/27/2011	10:03:49 AM	Bypass valve opened
4/27/2011	10:03:49 AM	Helium MFC set to  0.000000
4/27/2011	10:03:49 AM	H2 MFC set to  0.000000
4/27/2011	10:03:49 AM	BCl3 MFC set to  0.000000
4/27/2011	10:03:49 AM	PHl3 MFC set to  0.000000
4/27/2011	10:03:49 AM	SiCl4 MFC set to  0.000000
4/27/2011	10:03:49 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	10:03:49 AM	Tube furnace set to 0
4/27/2011	10:04:49 AM	H2 valve closed
4/27/2011	10:04:49 AM	BCl3 valve closed
4/27/2011	10:04:49 AM	PH3 valve closed
4/27/2011	10:04:49 AM	SiCl4 pre valve closed
4/27/2011	10:04:49 AM	SiCl4 post valve closed
4/27/2011	10:04:49 AM	Bubbler valve closed
4/27/2011	10:04:49 AM	Helium valve opened
4/27/2011	10:04:49 AM	Main Vac valve opened
4/27/2011	10:04:49 AM	Bypass valve opened
4/27/2011	10:04:49 AM	Helium MFC set to  100.000000
4/27/2011	10:04:49 AM	H2 MFC set to  0.000000
4/27/2011	10:04:49 AM	BCl3 MFC set to  0.000000
4/27/2011	10:04:49 AM	PHl3 MFC set to  0.000000
4/27/2011	10:04:49 AM	SiCl4 MFC set to  0.000000
4/27/2011	10:04:49 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	10:04:49 AM	Tube furnace set to 0
4/27/2011	10:05:49 AM	Helium valve closed
4/27/2011	10:05:49 AM	H2 valve closed
4/27/2011	10:05:49 AM	BCl3 valve closed
4/27/2011	10:05:49 AM	PH3 valve closed
4/27/2011	10:05:49 AM	SiCl4 pre valve closed
4/27/2011	10:05:49 AM	SiCl4 post valve closed
4/27/2011	10:05:49 AM	Bubbler valve closed
4/27/2011	10:05:49 AM	Main Vac valve opened
4/27/2011	10:05:49 AM	Bypass valve opened
4/27/2011	10:05:49 AM	Helium MFC set to  0.000000
4/27/2011	10:05:49 AM	H2 MFC set to  0.000000
4/27/2011	10:05:49 AM	BCl3 MFC set to  0.000000
4/27/2011	10:05:49 AM	PHl3 MFC set to  0.000000
4/27/2011	10:05:49 AM	SiCl4 MFC set to  0.000000
4/27/2011	10:05:49 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	10:05:50 AM	Tube furnace set to 0
4/27/2011	10:05:51 AM	Run finished at 10:05 AM
4/27/2011	10:05:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/27/2011	10:07:06 AM	Recipe started at 10:07 AM
4/27/2011	10:07:06 AM	Helium valve closed
4/27/2011	10:07:06 AM	BCl3 valve closed
4/27/2011	10:07:06 AM	PH3 valve closed
4/27/2011	10:07:06 AM	SiCl4 pre valve closed
4/27/2011	10:07:06 AM	SiCl4 post valve closed
4/27/2011	10:07:06 AM	Main Vac valve closed
4/27/2011	10:07:06 AM	Bypass valve closed
4/27/2011	10:07:06 AM	Bubbler valve closed
4/27/2011	10:07:06 AM	H2 valve opened
4/27/2011	10:07:06 AM	Helium MFC set to  0.000000
4/27/2011	10:07:06 AM	H2 MFC set to  500.000000
4/27/2011	10:07:06 AM	BCl3 MFC set to  0.000000
4/27/2011	10:07:06 AM	PHl3 MFC set to  0.000000
4/27/2011	10:07:06 AM	SiCl4 MFC set to  0.000000
4/27/2011	10:07:06 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	10:07:07 AM	Tube furnace set to 0
4/27/2011	10:08:29 AM	Helium valve closed
4/27/2011	10:08:29 AM	BCl3 valve closed
4/27/2011	10:08:29 AM	PH3 valve closed
4/27/2011	10:08:29 AM	SiCl4 pre valve closed
4/27/2011	10:08:29 AM	SiCl4 post valve closed
4/27/2011	10:08:29 AM	Main Vac valve closed
4/27/2011	10:08:29 AM	Bypass valve closed
4/27/2011	10:08:29 AM	H2 valve opened
4/27/2011	10:08:29 AM	Bubbler valve opened
4/27/2011	10:08:29 AM	Helium MFC set to  0.000000
4/27/2011	10:08:29 AM	H2 MFC set to  500.000000
4/27/2011	10:08:29 AM	BCl3 MFC set to  0.000000
4/27/2011	10:08:29 AM	PHl3 MFC set to  0.000000
4/27/2011	10:08:29 AM	SiCl4 MFC set to  0.000000
4/27/2011	10:08:29 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	10:08:29 AM	Tube furnace set to 1000
4/27/2011	10:28:29 AM	Helium valve closed
4/27/2011	10:28:29 AM	PH3 valve closed
4/27/2011	10:28:29 AM	Main Vac valve closed
4/27/2011	10:28:29 AM	Bypass valve closed
4/27/2011	10:28:29 AM	H2 valve opened
4/27/2011	10:28:29 AM	BCl3 valve opened
4/27/2011	10:28:29 AM	SiCl4 pre valve opened
4/27/2011	10:28:29 AM	SiCl4 post valve opened
4/27/2011	10:28:29 AM	Bubbler valve opened
4/27/2011	10:28:29 AM	Helium MFC set to  0.000000
4/27/2011	10:28:29 AM	H2 MFC set to  500.000000
4/27/2011	10:28:29 AM	BCl3 MFC set to  3.000000
4/27/2011	10:28:29 AM	PHl3 MFC set to  0.000000
4/27/2011	10:28:29 AM	SiCl4 MFC set to  50.000000
4/27/2011	10:28:29 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	10:28:29 AM	Tube furnace set to 1000
4/27/2011	10:43:29 AM	H2 valve closed
4/27/2011	10:43:29 AM	BCl3 valve closed
4/27/2011	10:43:29 AM	PH3 valve closed
4/27/2011	10:43:29 AM	SiCl4 pre valve closed
4/27/2011	10:43:29 AM	SiCl4 post valve closed
4/27/2011	10:43:29 AM	Main Vac valve closed
4/27/2011	10:43:29 AM	Bypass valve closed
4/27/2011	10:43:29 AM	Helium valve opened
4/27/2011	10:43:29 AM	Bubbler valve opened
4/27/2011	10:43:29 AM	Helium MFC set to  500.000000
4/27/2011	10:43:29 AM	H2 MFC set to  0.000000
4/27/2011	10:43:29 AM	BCl3 MFC set to  0.000000
4/27/2011	10:43:29 AM	PHl3 MFC set to  0.000000
4/27/2011	10:43:29 AM	SiCl4 MFC set to  0.000000
4/27/2011	10:43:29 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	10:43:30 AM	Tube furnace set to 0
4/27/2011	11:03:30 AM	Helium valve closed
4/27/2011	11:03:30 AM	H2 valve closed
4/27/2011	11:03:30 AM	BCl3 valve closed
4/27/2011	11:03:30 AM	PH3 valve closed
4/27/2011	11:03:30 AM	SiCl4 pre valve closed
4/27/2011	11:03:30 AM	SiCl4 post valve closed
4/27/2011	11:03:30 AM	Main Vac valve closed
4/27/2011	11:03:30 AM	Bypass valve closed
4/27/2011	11:03:30 AM	Bubbler valve closed
4/27/2011	11:03:30 AM	Helium MFC set to  0.000000
4/27/2011	11:03:30 AM	H2 MFC set to  0.000000
4/27/2011	11:03:30 AM	BCl3 MFC set to  0.000000
4/27/2011	11:03:30 AM	PHl3 MFC set to  0.000000
4/27/2011	11:03:30 AM	SiCl4 MFC set to  0.000000
4/27/2011	11:03:30 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	11:03:30 AM	Tube furnace set to 0
4/27/2011	11:03:30 AM	Run finished at 11:03 AM
4/27/2011	11:09:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/27/2011	11:09:42 AM	Recipe started at 11:09 AM
4/27/2011	11:09:42 AM	H2 valve closed
4/27/2011	11:09:42 AM	BCl3 valve closed
4/27/2011	11:09:42 AM	PH3 valve closed
4/27/2011	11:09:42 AM	SiCl4 pre valve closed
4/27/2011	11:09:42 AM	SiCl4 post valve closed
4/27/2011	11:09:42 AM	Main Vac valve closed
4/27/2011	11:09:42 AM	Bypass valve closed
4/27/2011	11:09:42 AM	Bubbler valve closed
4/27/2011	11:09:42 AM	Helium valve opened
4/27/2011	11:09:42 AM	Helium MFC set to  500.000000
4/27/2011	11:09:42 AM	H2 MFC set to  0.000000
4/27/2011	11:09:42 AM	BCl3 MFC set to  0.000000
4/27/2011	11:09:42 AM	PHl3 MFC set to  0.000000
4/27/2011	11:09:42 AM	SiCl4 MFC set to  0.000000
4/27/2011	11:09:42 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	11:09:43 AM	Tube furnace set to 0
4/27/2011	11:09:45 AM	Helium valve closed
4/27/2011	11:09:45 AM	H2 valve closed
4/27/2011	11:09:45 AM	BCl3 valve closed
4/27/2011	11:09:45 AM	PH3 valve closed
4/27/2011	11:09:45 AM	SiCl4 pre valve closed
4/27/2011	11:09:45 AM	SiCl4 post valve closed
4/27/2011	11:09:45 AM	Main Vac valve closed
4/27/2011	11:09:45 AM	Bypass valve closed
4/27/2011	11:09:45 AM	Bubbler valve closed
4/27/2011	11:09:45 AM	Helium MFC set to  0.000000
4/27/2011	11:09:45 AM	H2 MFC set to  0.000000
4/27/2011	11:09:45 AM	BCl3 MFC set to  0.000000
4/27/2011	11:09:45 AM	PHl3 MFC set to  0.000000
4/27/2011	11:09:45 AM	SiCl4 MFC set to  0.000000
4/27/2011	11:09:45 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	11:09:45 AM	Tube furnace set to 0
4/27/2011	11:09:45 AM	Run finished at 11:09 AM
4/27/2011	11:09:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/27/2011	11:14:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/27/2011	11:14:36 AM	Recipe started at 11:14 AM
4/27/2011	11:14:37 AM	Helium valve closed
4/27/2011	11:14:37 AM	H2 valve closed
4/27/2011	11:14:37 AM	BCl3 valve closed
4/27/2011	11:14:37 AM	PH3 valve closed
4/27/2011	11:14:37 AM	SiCl4 pre valve closed
4/27/2011	11:14:37 AM	SiCl4 post valve closed
4/27/2011	11:14:37 AM	Main Vac valve closed
4/27/2011	11:14:37 AM	Bubbler valve closed
4/27/2011	11:14:37 AM	Bypass valve opened
4/27/2011	11:14:37 AM	Helium MFC set to  0.000000
4/27/2011	11:14:37 AM	H2 MFC set to  0.000000
4/27/2011	11:14:37 AM	BCl3 MFC set to  0.000000
4/27/2011	11:14:37 AM	PHl3 MFC set to  0.000000
4/27/2011	11:14:37 AM	SiCl4 MFC set to  0.000000
4/27/2011	11:14:37 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	11:14:37 AM	Tube furnace set to 0
4/27/2011	11:15:09 AM	Helium valve closed
4/27/2011	11:15:09 AM	H2 valve closed
4/27/2011	11:15:09 AM	BCl3 valve closed
4/27/2011	11:15:09 AM	PH3 valve closed
4/27/2011	11:15:09 AM	SiCl4 pre valve closed
4/27/2011	11:15:09 AM	SiCl4 post valve closed
4/27/2011	11:15:09 AM	Bubbler valve closed
4/27/2011	11:15:09 AM	Main Vac valve opened
4/27/2011	11:15:09 AM	Bypass valve opened
4/27/2011	11:15:09 AM	Helium MFC set to  0.000000
4/27/2011	11:15:09 AM	H2 MFC set to  0.000000
4/27/2011	11:15:09 AM	BCl3 MFC set to  0.000000
4/27/2011	11:15:09 AM	PHl3 MFC set to  0.000000
4/27/2011	11:15:09 AM	SiCl4 MFC set to  0.000000
4/27/2011	11:15:09 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	11:15:09 AM	Tube furnace set to 0
4/27/2011	11:16:09 AM	H2 valve closed
4/27/2011	11:16:09 AM	BCl3 valve closed
4/27/2011	11:16:09 AM	PH3 valve closed
4/27/2011	11:16:09 AM	SiCl4 pre valve closed
4/27/2011	11:16:09 AM	SiCl4 post valve closed
4/27/2011	11:16:09 AM	Bubbler valve closed
4/27/2011	11:16:09 AM	Helium valve opened
4/27/2011	11:16:09 AM	Main Vac valve opened
4/27/2011	11:16:09 AM	Bypass valve opened
4/27/2011	11:16:09 AM	Helium MFC set to  100.000000
4/27/2011	11:16:09 AM	H2 MFC set to  0.000000
4/27/2011	11:16:09 AM	BCl3 MFC set to  0.000000
4/27/2011	11:16:09 AM	PHl3 MFC set to  0.000000
4/27/2011	11:16:09 AM	SiCl4 MFC set to  0.000000
4/27/2011	11:16:09 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	11:16:10 AM	Tube furnace set to 0
4/27/2011	11:17:10 AM	Helium valve closed
4/27/2011	11:17:10 AM	H2 valve closed
4/27/2011	11:17:10 AM	BCl3 valve closed
4/27/2011	11:17:10 AM	PH3 valve closed
4/27/2011	11:17:10 AM	SiCl4 pre valve closed
4/27/2011	11:17:10 AM	SiCl4 post valve closed
4/27/2011	11:17:10 AM	Bubbler valve closed
4/27/2011	11:17:10 AM	Main Vac valve opened
4/27/2011	11:17:10 AM	Bypass valve opened
4/27/2011	11:17:10 AM	Helium MFC set to  0.000000
4/27/2011	11:17:10 AM	H2 MFC set to  0.000000
4/27/2011	11:17:10 AM	BCl3 MFC set to  0.000000
4/27/2011	11:17:10 AM	PHl3 MFC set to  0.000000
4/27/2011	11:17:10 AM	SiCl4 MFC set to  0.000000
4/27/2011	11:17:10 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	11:17:10 AM	Tube furnace set to 0
4/27/2011	11:18:10 AM	H2 valve closed
4/27/2011	11:18:10 AM	BCl3 valve closed
4/27/2011	11:18:10 AM	PH3 valve closed
4/27/2011	11:18:10 AM	SiCl4 pre valve closed
4/27/2011	11:18:10 AM	SiCl4 post valve closed
4/27/2011	11:18:10 AM	Bubbler valve closed
4/27/2011	11:18:10 AM	Helium valve opened
4/27/2011	11:18:10 AM	Main Vac valve opened
4/27/2011	11:18:10 AM	Bypass valve opened
4/27/2011	11:18:10 AM	Helium MFC set to  100.000000
4/27/2011	11:18:10 AM	H2 MFC set to  0.000000
4/27/2011	11:18:10 AM	BCl3 MFC set to  0.000000
4/27/2011	11:18:10 AM	PHl3 MFC set to  0.000000
4/27/2011	11:18:10 AM	SiCl4 MFC set to  0.000000
4/27/2011	11:18:10 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	11:18:10 AM	Tube furnace set to 0
4/27/2011	11:19:10 AM	Helium valve closed
4/27/2011	11:19:10 AM	H2 valve closed
4/27/2011	11:19:10 AM	BCl3 valve closed
4/27/2011	11:19:10 AM	PH3 valve closed
4/27/2011	11:19:10 AM	SiCl4 pre valve closed
4/27/2011	11:19:10 AM	SiCl4 post valve closed
4/27/2011	11:19:10 AM	Bubbler valve closed
4/27/2011	11:19:10 AM	Main Vac valve opened
4/27/2011	11:19:10 AM	Bypass valve opened
4/27/2011	11:19:10 AM	Helium MFC set to  0.000000
4/27/2011	11:19:10 AM	H2 MFC set to  0.000000
4/27/2011	11:19:10 AM	BCl3 MFC set to  0.000000
4/27/2011	11:19:10 AM	PHl3 MFC set to  0.000000
4/27/2011	11:19:10 AM	SiCl4 MFC set to  0.000000
4/27/2011	11:19:10 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	11:19:10 AM	Tube furnace set to 0
4/27/2011	11:20:10 AM	H2 valve closed
4/27/2011	11:20:10 AM	BCl3 valve closed
4/27/2011	11:20:10 AM	PH3 valve closed
4/27/2011	11:20:10 AM	SiCl4 pre valve closed
4/27/2011	11:20:10 AM	SiCl4 post valve closed
4/27/2011	11:20:10 AM	Bubbler valve closed
4/27/2011	11:20:10 AM	Helium valve opened
4/27/2011	11:20:10 AM	Main Vac valve opened
4/27/2011	11:20:10 AM	Bypass valve opened
4/27/2011	11:20:10 AM	Helium MFC set to  100.000000
4/27/2011	11:20:10 AM	H2 MFC set to  0.000000
4/27/2011	11:20:10 AM	BCl3 MFC set to  0.000000
4/27/2011	11:20:10 AM	PHl3 MFC set to  0.000000
4/27/2011	11:20:10 AM	SiCl4 MFC set to  0.000000
4/27/2011	11:20:10 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	11:20:10 AM	Tube furnace set to 0
4/27/2011	11:21:10 AM	Helium valve closed
4/27/2011	11:21:10 AM	H2 valve closed
4/27/2011	11:21:10 AM	BCl3 valve closed
4/27/2011	11:21:10 AM	PH3 valve closed
4/27/2011	11:21:10 AM	SiCl4 pre valve closed
4/27/2011	11:21:10 AM	SiCl4 post valve closed
4/27/2011	11:21:10 AM	Bubbler valve closed
4/27/2011	11:21:10 AM	Main Vac valve opened
4/27/2011	11:21:10 AM	Bypass valve opened
4/27/2011	11:21:10 AM	Helium MFC set to  0.000000
4/27/2011	11:21:10 AM	H2 MFC set to  0.000000
4/27/2011	11:21:10 AM	BCl3 MFC set to  0.000000
4/27/2011	11:21:10 AM	PHl3 MFC set to  0.000000
4/27/2011	11:21:10 AM	SiCl4 MFC set to  0.000000
4/27/2011	11:21:10 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	11:21:11 AM	Tube furnace set to 0
4/27/2011	11:22:11 AM	H2 valve closed
4/27/2011	11:22:11 AM	BCl3 valve closed
4/27/2011	11:22:11 AM	PH3 valve closed
4/27/2011	11:22:11 AM	SiCl4 pre valve closed
4/27/2011	11:22:11 AM	SiCl4 post valve closed
4/27/2011	11:22:11 AM	Bubbler valve closed
4/27/2011	11:22:11 AM	Helium valve opened
4/27/2011	11:22:11 AM	Main Vac valve opened
4/27/2011	11:22:11 AM	Bypass valve opened
4/27/2011	11:22:11 AM	Helium MFC set to  100.000000
4/27/2011	11:22:11 AM	H2 MFC set to  0.000000
4/27/2011	11:22:11 AM	BCl3 MFC set to  0.000000
4/27/2011	11:22:11 AM	PHl3 MFC set to  0.000000
4/27/2011	11:22:11 AM	SiCl4 MFC set to  0.000000
4/27/2011	11:22:11 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	11:22:11 AM	Tube furnace set to 0
4/27/2011	11:23:11 AM	Helium valve closed
4/27/2011	11:23:11 AM	H2 valve closed
4/27/2011	11:23:11 AM	BCl3 valve closed
4/27/2011	11:23:11 AM	PH3 valve closed
4/27/2011	11:23:11 AM	SiCl4 pre valve closed
4/27/2011	11:23:11 AM	SiCl4 post valve closed
4/27/2011	11:23:11 AM	Bubbler valve closed
4/27/2011	11:23:11 AM	Main Vac valve opened
4/27/2011	11:23:11 AM	Bypass valve opened
4/27/2011	11:23:11 AM	Helium MFC set to  0.000000
4/27/2011	11:23:11 AM	H2 MFC set to  0.000000
4/27/2011	11:23:11 AM	BCl3 MFC set to  0.000000
4/27/2011	11:23:11 AM	PHl3 MFC set to  0.000000
4/27/2011	11:23:11 AM	SiCl4 MFC set to  0.000000
4/27/2011	11:23:11 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	11:23:11 AM	Tube furnace set to 0
4/27/2011	11:24:11 AM	H2 valve closed
4/27/2011	11:24:11 AM	BCl3 valve closed
4/27/2011	11:24:11 AM	PH3 valve closed
4/27/2011	11:24:11 AM	SiCl4 pre valve closed
4/27/2011	11:24:11 AM	SiCl4 post valve closed
4/27/2011	11:24:11 AM	Bubbler valve closed
4/27/2011	11:24:11 AM	Helium valve opened
4/27/2011	11:24:11 AM	Main Vac valve opened
4/27/2011	11:24:11 AM	Bypass valve opened
4/27/2011	11:24:11 AM	Helium MFC set to  100.000000
4/27/2011	11:24:11 AM	H2 MFC set to  0.000000
4/27/2011	11:24:11 AM	BCl3 MFC set to  0.000000
4/27/2011	11:24:11 AM	PHl3 MFC set to  0.000000
4/27/2011	11:24:11 AM	SiCl4 MFC set to  0.000000
4/27/2011	11:24:11 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	11:24:11 AM	Tube furnace set to 0
4/27/2011	11:25:11 AM	Helium valve closed
4/27/2011	11:25:11 AM	H2 valve closed
4/27/2011	11:25:11 AM	BCl3 valve closed
4/27/2011	11:25:11 AM	PH3 valve closed
4/27/2011	11:25:11 AM	SiCl4 pre valve closed
4/27/2011	11:25:11 AM	SiCl4 post valve closed
4/27/2011	11:25:11 AM	Bubbler valve closed
4/27/2011	11:25:11 AM	Main Vac valve opened
4/27/2011	11:25:11 AM	Bypass valve opened
4/27/2011	11:25:11 AM	Helium MFC set to  0.000000
4/27/2011	11:25:11 AM	H2 MFC set to  0.000000
4/27/2011	11:25:11 AM	BCl3 MFC set to  0.000000
4/27/2011	11:25:11 AM	PHl3 MFC set to  0.000000
4/27/2011	11:25:11 AM	SiCl4 MFC set to  0.000000
4/27/2011	11:25:11 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	11:25:11 AM	Tube furnace set to 0
4/27/2011	11:26:11 AM	H2 valve closed
4/27/2011	11:26:11 AM	BCl3 valve closed
4/27/2011	11:26:11 AM	PH3 valve closed
4/27/2011	11:26:11 AM	SiCl4 pre valve closed
4/27/2011	11:26:11 AM	SiCl4 post valve closed
4/27/2011	11:26:11 AM	Bubbler valve closed
4/27/2011	11:26:11 AM	Helium valve opened
4/27/2011	11:26:11 AM	Main Vac valve opened
4/27/2011	11:26:11 AM	Bypass valve opened
4/27/2011	11:26:11 AM	Helium MFC set to  100.000000
4/27/2011	11:26:11 AM	H2 MFC set to  0.000000
4/27/2011	11:26:11 AM	BCl3 MFC set to  0.000000
4/27/2011	11:26:11 AM	PHl3 MFC set to  0.000000
4/27/2011	11:26:11 AM	SiCl4 MFC set to  0.000000
4/27/2011	11:26:11 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	11:26:12 AM	Tube furnace set to 0
4/27/2011	11:27:12 AM	Helium valve closed
4/27/2011	11:27:12 AM	H2 valve closed
4/27/2011	11:27:12 AM	BCl3 valve closed
4/27/2011	11:27:12 AM	PH3 valve closed
4/27/2011	11:27:12 AM	SiCl4 pre valve closed
4/27/2011	11:27:12 AM	SiCl4 post valve closed
4/27/2011	11:27:12 AM	Bubbler valve closed
4/27/2011	11:27:12 AM	Main Vac valve opened
4/27/2011	11:27:12 AM	Bypass valve opened
4/27/2011	11:27:12 AM	Helium MFC set to  0.000000
4/27/2011	11:27:12 AM	H2 MFC set to  0.000000
4/27/2011	11:27:12 AM	BCl3 MFC set to  0.000000
4/27/2011	11:27:12 AM	PHl3 MFC set to  0.000000
4/27/2011	11:27:12 AM	SiCl4 MFC set to  0.000000
4/27/2011	11:27:12 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	11:27:12 AM	Tube furnace set to 0
4/27/2011	11:28:12 AM	H2 valve closed
4/27/2011	11:28:12 AM	BCl3 valve closed
4/27/2011	11:28:12 AM	PH3 valve closed
4/27/2011	11:28:12 AM	SiCl4 pre valve closed
4/27/2011	11:28:12 AM	SiCl4 post valve closed
4/27/2011	11:28:12 AM	Bubbler valve closed
4/27/2011	11:28:12 AM	Helium valve opened
4/27/2011	11:28:12 AM	Main Vac valve opened
4/27/2011	11:28:12 AM	Bypass valve opened
4/27/2011	11:28:12 AM	Helium MFC set to  100.000000
4/27/2011	11:28:12 AM	H2 MFC set to  0.000000
4/27/2011	11:28:12 AM	BCl3 MFC set to  0.000000
4/27/2011	11:28:12 AM	PHl3 MFC set to  0.000000
4/27/2011	11:28:12 AM	SiCl4 MFC set to  0.000000
4/27/2011	11:28:12 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	11:28:12 AM	Tube furnace set to 0
4/27/2011	11:29:12 AM	Helium valve closed
4/27/2011	11:29:12 AM	H2 valve closed
4/27/2011	11:29:12 AM	BCl3 valve closed
4/27/2011	11:29:12 AM	PH3 valve closed
4/27/2011	11:29:12 AM	SiCl4 pre valve closed
4/27/2011	11:29:12 AM	SiCl4 post valve closed
4/27/2011	11:29:12 AM	Bubbler valve closed
4/27/2011	11:29:12 AM	Main Vac valve opened
4/27/2011	11:29:12 AM	Bypass valve opened
4/27/2011	11:29:12 AM	Helium MFC set to  0.000000
4/27/2011	11:29:12 AM	H2 MFC set to  0.000000
4/27/2011	11:29:12 AM	BCl3 MFC set to  0.000000
4/27/2011	11:29:12 AM	PHl3 MFC set to  0.000000
4/27/2011	11:29:12 AM	SiCl4 MFC set to  0.000000
4/27/2011	11:29:12 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	11:29:12 AM	Tube furnace set to 0
4/27/2011	11:30:12 AM	H2 valve closed
4/27/2011	11:30:12 AM	BCl3 valve closed
4/27/2011	11:30:12 AM	PH3 valve closed
4/27/2011	11:30:12 AM	SiCl4 pre valve closed
4/27/2011	11:30:12 AM	SiCl4 post valve closed
4/27/2011	11:30:12 AM	Bubbler valve closed
4/27/2011	11:30:12 AM	Helium valve opened
4/27/2011	11:30:12 AM	Main Vac valve opened
4/27/2011	11:30:12 AM	Bypass valve opened
4/27/2011	11:30:12 AM	Helium MFC set to  100.000000
4/27/2011	11:30:12 AM	H2 MFC set to  0.000000
4/27/2011	11:30:12 AM	BCl3 MFC set to  0.000000
4/27/2011	11:30:12 AM	PHl3 MFC set to  0.000000
4/27/2011	11:30:12 AM	SiCl4 MFC set to  0.000000
4/27/2011	11:30:12 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	11:30:12 AM	Tube furnace set to 0
4/27/2011	11:31:12 AM	Helium valve closed
4/27/2011	11:31:12 AM	H2 valve closed
4/27/2011	11:31:12 AM	BCl3 valve closed
4/27/2011	11:31:12 AM	PH3 valve closed
4/27/2011	11:31:12 AM	SiCl4 pre valve closed
4/27/2011	11:31:12 AM	SiCl4 post valve closed
4/27/2011	11:31:12 AM	Bubbler valve closed
4/27/2011	11:31:12 AM	Main Vac valve opened
4/27/2011	11:31:12 AM	Bypass valve opened
4/27/2011	11:31:12 AM	Helium MFC set to  0.000000
4/27/2011	11:31:12 AM	H2 MFC set to  0.000000
4/27/2011	11:31:12 AM	BCl3 MFC set to  0.000000
4/27/2011	11:31:12 AM	PHl3 MFC set to  0.000000
4/27/2011	11:31:12 AM	SiCl4 MFC set to  0.000000
4/27/2011	11:31:12 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	11:31:13 AM	Tube furnace set to 0
4/27/2011	11:32:13 AM	H2 valve closed
4/27/2011	11:32:13 AM	BCl3 valve closed
4/27/2011	11:32:13 AM	PH3 valve closed
4/27/2011	11:32:13 AM	SiCl4 pre valve closed
4/27/2011	11:32:13 AM	SiCl4 post valve closed
4/27/2011	11:32:13 AM	Bubbler valve closed
4/27/2011	11:32:13 AM	Helium valve opened
4/27/2011	11:32:13 AM	Main Vac valve opened
4/27/2011	11:32:13 AM	Bypass valve opened
4/27/2011	11:32:13 AM	Helium MFC set to  100.000000
4/27/2011	11:32:13 AM	H2 MFC set to  0.000000
4/27/2011	11:32:13 AM	BCl3 MFC set to  0.000000
4/27/2011	11:32:13 AM	PHl3 MFC set to  0.000000
4/27/2011	11:32:13 AM	SiCl4 MFC set to  0.000000
4/27/2011	11:32:13 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	11:32:13 AM	Tube furnace set to 0
4/27/2011	11:33:13 AM	Helium valve closed
4/27/2011	11:33:13 AM	H2 valve closed
4/27/2011	11:33:13 AM	BCl3 valve closed
4/27/2011	11:33:13 AM	PH3 valve closed
4/27/2011	11:33:13 AM	SiCl4 pre valve closed
4/27/2011	11:33:13 AM	SiCl4 post valve closed
4/27/2011	11:33:13 AM	Bubbler valve closed
4/27/2011	11:33:13 AM	Main Vac valve opened
4/27/2011	11:33:13 AM	Bypass valve opened
4/27/2011	11:33:13 AM	Helium MFC set to  0.000000
4/27/2011	11:33:13 AM	H2 MFC set to  0.000000
4/27/2011	11:33:13 AM	BCl3 MFC set to  0.000000
4/27/2011	11:33:13 AM	PHl3 MFC set to  0.000000
4/27/2011	11:33:13 AM	SiCl4 MFC set to  0.000000
4/27/2011	11:33:13 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	11:33:13 AM	Tube furnace set to 0
4/27/2011	11:34:13 AM	H2 valve closed
4/27/2011	11:34:13 AM	BCl3 valve closed
4/27/2011	11:34:13 AM	PH3 valve closed
4/27/2011	11:34:13 AM	SiCl4 pre valve closed
4/27/2011	11:34:13 AM	SiCl4 post valve closed
4/27/2011	11:34:13 AM	Bubbler valve closed
4/27/2011	11:34:13 AM	Helium valve opened
4/27/2011	11:34:13 AM	Main Vac valve opened
4/27/2011	11:34:13 AM	Bypass valve opened
4/27/2011	11:34:13 AM	Helium MFC set to  100.000000
4/27/2011	11:34:13 AM	H2 MFC set to  0.000000
4/27/2011	11:34:13 AM	BCl3 MFC set to  0.000000
4/27/2011	11:34:13 AM	PHl3 MFC set to  0.000000
4/27/2011	11:34:13 AM	SiCl4 MFC set to  0.000000
4/27/2011	11:34:13 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	11:34:13 AM	Tube furnace set to 0
4/27/2011	11:35:13 AM	Helium valve closed
4/27/2011	11:35:13 AM	H2 valve closed
4/27/2011	11:35:13 AM	BCl3 valve closed
4/27/2011	11:35:13 AM	PH3 valve closed
4/27/2011	11:35:13 AM	SiCl4 pre valve closed
4/27/2011	11:35:13 AM	SiCl4 post valve closed
4/27/2011	11:35:13 AM	Bubbler valve closed
4/27/2011	11:35:13 AM	Main Vac valve opened
4/27/2011	11:35:13 AM	Bypass valve opened
4/27/2011	11:35:13 AM	Helium MFC set to  0.000000
4/27/2011	11:35:13 AM	H2 MFC set to  0.000000
4/27/2011	11:35:13 AM	BCl3 MFC set to  0.000000
4/27/2011	11:35:13 AM	PHl3 MFC set to  0.000000
4/27/2011	11:35:13 AM	SiCl4 MFC set to  0.000000
4/27/2011	11:35:13 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	11:35:13 AM	Tube furnace set to 0
4/27/2011	11:35:14 AM	Run finished at 11:35 AM
4/27/2011	11:35:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/27/2011	11:38:39 AM	Recipe started at 11:38 AM
4/27/2011	11:38:39 AM	Helium valve closed
4/27/2011	11:38:39 AM	BCl3 valve closed
4/27/2011	11:38:39 AM	PH3 valve closed
4/27/2011	11:38:39 AM	SiCl4 pre valve closed
4/27/2011	11:38:39 AM	SiCl4 post valve closed
4/27/2011	11:38:39 AM	Main Vac valve closed
4/27/2011	11:38:39 AM	Bypass valve closed
4/27/2011	11:38:39 AM	Bubbler valve closed
4/27/2011	11:38:39 AM	H2 valve opened
4/27/2011	11:38:39 AM	Helium MFC set to  0.000000
4/27/2011	11:38:39 AM	H2 MFC set to  500.000000
4/27/2011	11:38:39 AM	BCl3 MFC set to  0.000000
4/27/2011	11:38:39 AM	PHl3 MFC set to  0.000000
4/27/2011	11:38:39 AM	SiCl4 MFC set to  0.000000
4/27/2011	11:38:39 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	11:38:40 AM	Tube furnace set to 0
4/27/2011	11:39:57 AM	Helium valve closed
4/27/2011	11:39:57 AM	BCl3 valve closed
4/27/2011	11:39:57 AM	PH3 valve closed
4/27/2011	11:39:57 AM	SiCl4 pre valve closed
4/27/2011	11:39:57 AM	SiCl4 post valve closed
4/27/2011	11:39:57 AM	Main Vac valve closed
4/27/2011	11:39:57 AM	Bypass valve closed
4/27/2011	11:39:57 AM	H2 valve opened
4/27/2011	11:39:57 AM	Bubbler valve opened
4/27/2011	11:39:57 AM	Helium MFC set to  0.000000
4/27/2011	11:39:57 AM	H2 MFC set to  500.000000
4/27/2011	11:39:57 AM	BCl3 MFC set to  0.000000
4/27/2011	11:39:57 AM	PHl3 MFC set to  0.000000
4/27/2011	11:39:57 AM	SiCl4 MFC set to  0.000000
4/27/2011	11:39:57 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	11:39:57 AM	Tube furnace set to 1000
4/27/2011	11:59:57 AM	Helium valve closed
4/27/2011	11:59:57 AM	PH3 valve closed
4/27/2011	11:59:57 AM	Main Vac valve closed
4/27/2011	11:59:57 AM	Bypass valve closed
4/27/2011	11:59:57 AM	H2 valve opened
4/27/2011	11:59:57 AM	BCl3 valve opened
4/27/2011	11:59:57 AM	SiCl4 pre valve opened
4/27/2011	11:59:57 AM	SiCl4 post valve opened
4/27/2011	11:59:57 AM	Bubbler valve opened
4/27/2011	11:59:57 AM	Helium MFC set to  0.000000
4/27/2011	11:59:57 AM	H2 MFC set to  500.000000
4/27/2011	11:59:57 AM	BCl3 MFC set to  3.000000
4/27/2011	11:59:57 AM	PHl3 MFC set to  0.000000
4/27/2011	11:59:57 AM	SiCl4 MFC set to  50.000000
4/27/2011	11:59:57 AM	Bypass solenoid MFC set to  0.000000
4/27/2011	11:59:57 AM	Tube furnace set to 1000
4/27/2011	12:14:57 PM	H2 valve closed
4/27/2011	12:14:57 PM	BCl3 valve closed
4/27/2011	12:14:57 PM	PH3 valve closed
4/27/2011	12:14:57 PM	SiCl4 pre valve closed
4/27/2011	12:14:57 PM	SiCl4 post valve closed
4/27/2011	12:14:57 PM	Main Vac valve closed
4/27/2011	12:14:57 PM	Bypass valve closed
4/27/2011	12:14:57 PM	Helium valve opened
4/27/2011	12:14:57 PM	Bubbler valve opened
4/27/2011	12:14:57 PM	Helium MFC set to  500.000000
4/27/2011	12:14:57 PM	H2 MFC set to  0.000000
4/27/2011	12:14:57 PM	BCl3 MFC set to  0.000000
4/27/2011	12:14:57 PM	PHl3 MFC set to  0.000000
4/27/2011	12:14:57 PM	SiCl4 MFC set to  0.000000
4/27/2011	12:14:57 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	12:14:57 PM	Tube furnace set to 0
4/27/2011	12:34:57 PM	Helium valve closed
4/27/2011	12:34:57 PM	H2 valve closed
4/27/2011	12:34:57 PM	BCl3 valve closed
4/27/2011	12:34:57 PM	PH3 valve closed
4/27/2011	12:34:57 PM	SiCl4 pre valve closed
4/27/2011	12:34:57 PM	SiCl4 post valve closed
4/27/2011	12:34:57 PM	Main Vac valve closed
4/27/2011	12:34:57 PM	Bypass valve closed
4/27/2011	12:34:58 PM	Bubbler valve closed
4/27/2011	12:34:58 PM	Helium MFC set to  0.000000
4/27/2011	12:34:58 PM	H2 MFC set to  0.000000
4/27/2011	12:34:58 PM	BCl3 MFC set to  0.000000
4/27/2011	12:34:58 PM	PHl3 MFC set to  0.000000
4/27/2011	12:34:58 PM	SiCl4 MFC set to  0.000000
4/27/2011	12:34:58 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	12:34:58 PM	Tube furnace set to 0
4/27/2011	12:34:58 PM	Run finished at 12:34 PM
4/27/2011	12:41:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/27/2011	12:41:47 PM	Recipe started at 12:41 PM
4/27/2011	12:41:47 PM	Helium valve closed
4/27/2011	12:41:47 PM	H2 valve closed
4/27/2011	12:41:47 PM	BCl3 valve closed
4/27/2011	12:41:47 PM	PH3 valve closed
4/27/2011	12:41:47 PM	SiCl4 pre valve closed
4/27/2011	12:41:47 PM	SiCl4 post valve closed
4/27/2011	12:41:47 PM	Main Vac valve closed
4/27/2011	12:41:47 PM	Bubbler valve closed
4/27/2011	12:41:47 PM	Bypass valve opened
4/27/2011	12:41:47 PM	Helium MFC set to  0.000000
4/27/2011	12:41:47 PM	H2 MFC set to  0.000000
4/27/2011	12:41:47 PM	BCl3 MFC set to  0.000000
4/27/2011	12:41:47 PM	PHl3 MFC set to  0.000000
4/27/2011	12:41:47 PM	SiCl4 MFC set to  0.000000
4/27/2011	12:41:47 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	12:41:47 PM	Tube furnace set to 0
4/27/2011	12:42:20 PM	Helium valve closed
4/27/2011	12:42:20 PM	H2 valve closed
4/27/2011	12:42:20 PM	BCl3 valve closed
4/27/2011	12:42:20 PM	PH3 valve closed
4/27/2011	12:42:20 PM	SiCl4 pre valve closed
4/27/2011	12:42:20 PM	SiCl4 post valve closed
4/27/2011	12:42:20 PM	Bubbler valve closed
4/27/2011	12:42:20 PM	Main Vac valve opened
4/27/2011	12:42:20 PM	Bypass valve opened
4/27/2011	12:42:20 PM	Helium MFC set to  0.000000
4/27/2011	12:42:20 PM	H2 MFC set to  0.000000
4/27/2011	12:42:20 PM	BCl3 MFC set to  0.000000
4/27/2011	12:42:20 PM	PHl3 MFC set to  0.000000
4/27/2011	12:42:20 PM	SiCl4 MFC set to  0.000000
4/27/2011	12:42:20 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	12:42:20 PM	Tube furnace set to 0
4/27/2011	12:42:20 PM	Run finished at 12:42 PM
4/27/2011	12:42:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/27/2011	12:42:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/27/2011	12:42:33 PM	Recipe started at 12:42 PM
4/27/2011	12:42:33 PM	Helium valve closed
4/27/2011	12:42:33 PM	H2 valve closed
4/27/2011	12:42:33 PM	BCl3 valve closed
4/27/2011	12:42:33 PM	PH3 valve closed
4/27/2011	12:42:33 PM	SiCl4 pre valve closed
4/27/2011	12:42:33 PM	SiCl4 post valve closed
4/27/2011	12:42:33 PM	Main Vac valve closed
4/27/2011	12:42:33 PM	Bubbler valve closed
4/27/2011	12:42:33 PM	Bypass valve opened
4/27/2011	12:42:33 PM	Helium MFC set to  0.000000
4/27/2011	12:42:33 PM	H2 MFC set to  0.000000
4/27/2011	12:42:33 PM	BCl3 MFC set to  0.000000
4/27/2011	12:42:33 PM	PHl3 MFC set to  0.000000
4/27/2011	12:42:33 PM	SiCl4 MFC set to  0.000000
4/27/2011	12:42:33 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	12:42:33 PM	Tube furnace set to 0
4/27/2011	12:42:34 PM	Helium valve closed
4/27/2011	12:42:34 PM	H2 valve closed
4/27/2011	12:42:34 PM	BCl3 valve closed
4/27/2011	12:42:34 PM	PH3 valve closed
4/27/2011	12:42:34 PM	SiCl4 pre valve closed
4/27/2011	12:42:34 PM	SiCl4 post valve closed
4/27/2011	12:42:34 PM	Bubbler valve closed
4/27/2011	12:42:34 PM	Main Vac valve opened
4/27/2011	12:42:34 PM	Bypass valve opened
4/27/2011	12:42:34 PM	Helium MFC set to  0.000000
4/27/2011	12:42:34 PM	H2 MFC set to  0.000000
4/27/2011	12:42:34 PM	BCl3 MFC set to  0.000000
4/27/2011	12:42:34 PM	PHl3 MFC set to  0.000000
4/27/2011	12:42:34 PM	SiCl4 MFC set to  0.000000
4/27/2011	12:42:34 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	12:42:34 PM	Tube furnace set to 0
4/27/2011	12:43:34 PM	H2 valve closed
4/27/2011	12:43:34 PM	BCl3 valve closed
4/27/2011	12:43:34 PM	PH3 valve closed
4/27/2011	12:43:34 PM	SiCl4 pre valve closed
4/27/2011	12:43:34 PM	SiCl4 post valve closed
4/27/2011	12:43:34 PM	Bubbler valve closed
4/27/2011	12:43:34 PM	Helium valve opened
4/27/2011	12:43:34 PM	Main Vac valve opened
4/27/2011	12:43:34 PM	Bypass valve opened
4/27/2011	12:43:34 PM	Helium MFC set to  100.000000
4/27/2011	12:43:34 PM	H2 MFC set to  0.000000
4/27/2011	12:43:34 PM	BCl3 MFC set to  0.000000
4/27/2011	12:43:34 PM	PHl3 MFC set to  0.000000
4/27/2011	12:43:34 PM	SiCl4 MFC set to  0.000000
4/27/2011	12:43:34 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	12:43:34 PM	Tube furnace set to 0
4/27/2011	12:44:34 PM	Helium valve closed
4/27/2011	12:44:34 PM	H2 valve closed
4/27/2011	12:44:34 PM	BCl3 valve closed
4/27/2011	12:44:34 PM	PH3 valve closed
4/27/2011	12:44:34 PM	SiCl4 pre valve closed
4/27/2011	12:44:34 PM	SiCl4 post valve closed
4/27/2011	12:44:34 PM	Bubbler valve closed
4/27/2011	12:44:34 PM	Main Vac valve opened
4/27/2011	12:44:34 PM	Bypass valve opened
4/27/2011	12:44:34 PM	Helium MFC set to  0.000000
4/27/2011	12:44:34 PM	H2 MFC set to  0.000000
4/27/2011	12:44:34 PM	BCl3 MFC set to  0.000000
4/27/2011	12:44:34 PM	PHl3 MFC set to  0.000000
4/27/2011	12:44:34 PM	SiCl4 MFC set to  0.000000
4/27/2011	12:44:34 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	12:44:34 PM	Tube furnace set to 0
4/27/2011	12:45:34 PM	H2 valve closed
4/27/2011	12:45:34 PM	BCl3 valve closed
4/27/2011	12:45:34 PM	PH3 valve closed
4/27/2011	12:45:34 PM	SiCl4 pre valve closed
4/27/2011	12:45:34 PM	SiCl4 post valve closed
4/27/2011	12:45:34 PM	Bubbler valve closed
4/27/2011	12:45:34 PM	Helium valve opened
4/27/2011	12:45:34 PM	Main Vac valve opened
4/27/2011	12:45:34 PM	Bypass valve opened
4/27/2011	12:45:34 PM	Helium MFC set to  100.000000
4/27/2011	12:45:34 PM	H2 MFC set to  0.000000
4/27/2011	12:45:34 PM	BCl3 MFC set to  0.000000
4/27/2011	12:45:34 PM	PHl3 MFC set to  0.000000
4/27/2011	12:45:34 PM	SiCl4 MFC set to  0.000000
4/27/2011	12:45:34 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	12:45:34 PM	Tube furnace set to 0
4/27/2011	12:46:34 PM	Helium valve closed
4/27/2011	12:46:34 PM	H2 valve closed
4/27/2011	12:46:34 PM	BCl3 valve closed
4/27/2011	12:46:34 PM	PH3 valve closed
4/27/2011	12:46:34 PM	SiCl4 pre valve closed
4/27/2011	12:46:34 PM	SiCl4 post valve closed
4/27/2011	12:46:34 PM	Bubbler valve closed
4/27/2011	12:46:34 PM	Main Vac valve opened
4/27/2011	12:46:34 PM	Bypass valve opened
4/27/2011	12:46:34 PM	Helium MFC set to  0.000000
4/27/2011	12:46:34 PM	H2 MFC set to  0.000000
4/27/2011	12:46:34 PM	BCl3 MFC set to  0.000000
4/27/2011	12:46:34 PM	PHl3 MFC set to  0.000000
4/27/2011	12:46:34 PM	SiCl4 MFC set to  0.000000
4/27/2011	12:46:34 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	12:46:34 PM	Tube furnace set to 0
4/27/2011	12:47:34 PM	H2 valve closed
4/27/2011	12:47:35 PM	BCl3 valve closed
4/27/2011	12:47:35 PM	PH3 valve closed
4/27/2011	12:47:35 PM	SiCl4 pre valve closed
4/27/2011	12:47:35 PM	SiCl4 post valve closed
4/27/2011	12:47:35 PM	Bubbler valve closed
4/27/2011	12:47:35 PM	Helium valve opened
4/27/2011	12:47:35 PM	Main Vac valve opened
4/27/2011	12:47:35 PM	Bypass valve opened
4/27/2011	12:47:35 PM	Helium MFC set to  100.000000
4/27/2011	12:47:35 PM	H2 MFC set to  0.000000
4/27/2011	12:47:35 PM	BCl3 MFC set to  0.000000
4/27/2011	12:47:35 PM	PHl3 MFC set to  0.000000
4/27/2011	12:47:35 PM	SiCl4 MFC set to  0.000000
4/27/2011	12:47:35 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	12:47:35 PM	Tube furnace set to 0
4/27/2011	12:48:35 PM	Helium valve closed
4/27/2011	12:48:35 PM	H2 valve closed
4/27/2011	12:48:35 PM	BCl3 valve closed
4/27/2011	12:48:35 PM	PH3 valve closed
4/27/2011	12:48:35 PM	SiCl4 pre valve closed
4/27/2011	12:48:35 PM	SiCl4 post valve closed
4/27/2011	12:48:35 PM	Bubbler valve closed
4/27/2011	12:48:35 PM	Main Vac valve opened
4/27/2011	12:48:35 PM	Bypass valve opened
4/27/2011	12:48:35 PM	Helium MFC set to  0.000000
4/27/2011	12:48:35 PM	H2 MFC set to  0.000000
4/27/2011	12:48:35 PM	BCl3 MFC set to  0.000000
4/27/2011	12:48:35 PM	PHl3 MFC set to  0.000000
4/27/2011	12:48:35 PM	SiCl4 MFC set to  0.000000
4/27/2011	12:48:35 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	12:48:35 PM	Tube furnace set to 0
4/27/2011	12:49:35 PM	H2 valve closed
4/27/2011	12:49:35 PM	BCl3 valve closed
4/27/2011	12:49:35 PM	PH3 valve closed
4/27/2011	12:49:35 PM	SiCl4 pre valve closed
4/27/2011	12:49:35 PM	SiCl4 post valve closed
4/27/2011	12:49:35 PM	Bubbler valve closed
4/27/2011	12:49:35 PM	Helium valve opened
4/27/2011	12:49:35 PM	Main Vac valve opened
4/27/2011	12:49:35 PM	Bypass valve opened
4/27/2011	12:49:35 PM	Helium MFC set to  100.000000
4/27/2011	12:49:35 PM	H2 MFC set to  0.000000
4/27/2011	12:49:35 PM	BCl3 MFC set to  0.000000
4/27/2011	12:49:35 PM	PHl3 MFC set to  0.000000
4/27/2011	12:49:35 PM	SiCl4 MFC set to  0.000000
4/27/2011	12:49:35 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	12:49:35 PM	Tube furnace set to 0
4/27/2011	12:50:35 PM	Helium valve closed
4/27/2011	12:50:35 PM	H2 valve closed
4/27/2011	12:50:35 PM	BCl3 valve closed
4/27/2011	12:50:35 PM	PH3 valve closed
4/27/2011	12:50:35 PM	SiCl4 pre valve closed
4/27/2011	12:50:35 PM	SiCl4 post valve closed
4/27/2011	12:50:35 PM	Bubbler valve closed
4/27/2011	12:50:35 PM	Main Vac valve opened
4/27/2011	12:50:35 PM	Bypass valve opened
4/27/2011	12:50:35 PM	Helium MFC set to  0.000000
4/27/2011	12:50:35 PM	H2 MFC set to  0.000000
4/27/2011	12:50:35 PM	BCl3 MFC set to  0.000000
4/27/2011	12:50:35 PM	PHl3 MFC set to  0.000000
4/27/2011	12:50:35 PM	SiCl4 MFC set to  0.000000
4/27/2011	12:50:35 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	12:50:35 PM	Tube furnace set to 0
4/27/2011	12:51:35 PM	H2 valve closed
4/27/2011	12:51:35 PM	BCl3 valve closed
4/27/2011	12:51:35 PM	PH3 valve closed
4/27/2011	12:51:35 PM	SiCl4 pre valve closed
4/27/2011	12:51:35 PM	SiCl4 post valve closed
4/27/2011	12:51:35 PM	Bubbler valve closed
4/27/2011	12:51:35 PM	Helium valve opened
4/27/2011	12:51:35 PM	Main Vac valve opened
4/27/2011	12:51:35 PM	Bypass valve opened
4/27/2011	12:51:35 PM	Helium MFC set to  100.000000
4/27/2011	12:51:35 PM	H2 MFC set to  0.000000
4/27/2011	12:51:35 PM	BCl3 MFC set to  0.000000
4/27/2011	12:51:35 PM	PHl3 MFC set to  0.000000
4/27/2011	12:51:35 PM	SiCl4 MFC set to  0.000000
4/27/2011	12:51:35 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	12:51:35 PM	Tube furnace set to 0
4/27/2011	12:52:35 PM	Helium valve closed
4/27/2011	12:52:35 PM	H2 valve closed
4/27/2011	12:52:35 PM	BCl3 valve closed
4/27/2011	12:52:35 PM	PH3 valve closed
4/27/2011	12:52:35 PM	SiCl4 pre valve closed
4/27/2011	12:52:35 PM	SiCl4 post valve closed
4/27/2011	12:52:35 PM	Bubbler valve closed
4/27/2011	12:52:35 PM	Main Vac valve opened
4/27/2011	12:52:35 PM	Bypass valve opened
4/27/2011	12:52:35 PM	Helium MFC set to  0.000000
4/27/2011	12:52:35 PM	H2 MFC set to  0.000000
4/27/2011	12:52:35 PM	BCl3 MFC set to  0.000000
4/27/2011	12:52:35 PM	PHl3 MFC set to  0.000000
4/27/2011	12:52:35 PM	SiCl4 MFC set to  0.000000
4/27/2011	12:52:35 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	12:52:36 PM	Tube furnace set to 0
4/27/2011	12:53:36 PM	H2 valve closed
4/27/2011	12:53:36 PM	BCl3 valve closed
4/27/2011	12:53:36 PM	PH3 valve closed
4/27/2011	12:53:36 PM	SiCl4 pre valve closed
4/27/2011	12:53:36 PM	SiCl4 post valve closed
4/27/2011	12:53:36 PM	Bubbler valve closed
4/27/2011	12:53:36 PM	Helium valve opened
4/27/2011	12:53:36 PM	Main Vac valve opened
4/27/2011	12:53:36 PM	Bypass valve opened
4/27/2011	12:53:36 PM	Helium MFC set to  100.000000
4/27/2011	12:53:36 PM	H2 MFC set to  0.000000
4/27/2011	12:53:36 PM	BCl3 MFC set to  0.000000
4/27/2011	12:53:36 PM	PHl3 MFC set to  0.000000
4/27/2011	12:53:36 PM	SiCl4 MFC set to  0.000000
4/27/2011	12:53:36 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	12:53:36 PM	Tube furnace set to 0
4/27/2011	12:54:36 PM	Helium valve closed
4/27/2011	12:54:36 PM	H2 valve closed
4/27/2011	12:54:36 PM	BCl3 valve closed
4/27/2011	12:54:36 PM	PH3 valve closed
4/27/2011	12:54:36 PM	SiCl4 pre valve closed
4/27/2011	12:54:36 PM	SiCl4 post valve closed
4/27/2011	12:54:36 PM	Bubbler valve closed
4/27/2011	12:54:36 PM	Main Vac valve opened
4/27/2011	12:54:36 PM	Bypass valve opened
4/27/2011	12:54:36 PM	Helium MFC set to  0.000000
4/27/2011	12:54:36 PM	H2 MFC set to  0.000000
4/27/2011	12:54:36 PM	BCl3 MFC set to  0.000000
4/27/2011	12:54:36 PM	PHl3 MFC set to  0.000000
4/27/2011	12:54:36 PM	SiCl4 MFC set to  0.000000
4/27/2011	12:54:36 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	12:54:36 PM	Tube furnace set to 0
4/27/2011	12:55:36 PM	H2 valve closed
4/27/2011	12:55:36 PM	BCl3 valve closed
4/27/2011	12:55:36 PM	PH3 valve closed
4/27/2011	12:55:36 PM	SiCl4 pre valve closed
4/27/2011	12:55:36 PM	SiCl4 post valve closed
4/27/2011	12:55:36 PM	Bubbler valve closed
4/27/2011	12:55:36 PM	Helium valve opened
4/27/2011	12:55:36 PM	Main Vac valve opened
4/27/2011	12:55:36 PM	Bypass valve opened
4/27/2011	12:55:36 PM	Helium MFC set to  100.000000
4/27/2011	12:55:36 PM	H2 MFC set to  0.000000
4/27/2011	12:55:36 PM	BCl3 MFC set to  0.000000
4/27/2011	12:55:36 PM	PHl3 MFC set to  0.000000
4/27/2011	12:55:36 PM	SiCl4 MFC set to  0.000000
4/27/2011	12:55:36 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	12:55:36 PM	Tube furnace set to 0
4/27/2011	12:56:36 PM	Helium valve closed
4/27/2011	12:56:36 PM	H2 valve closed
4/27/2011	12:56:36 PM	BCl3 valve closed
4/27/2011	12:56:36 PM	PH3 valve closed
4/27/2011	12:56:36 PM	SiCl4 pre valve closed
4/27/2011	12:56:36 PM	SiCl4 post valve closed
4/27/2011	12:56:36 PM	Bubbler valve closed
4/27/2011	12:56:36 PM	Main Vac valve opened
4/27/2011	12:56:36 PM	Bypass valve opened
4/27/2011	12:56:36 PM	Helium MFC set to  0.000000
4/27/2011	12:56:36 PM	H2 MFC set to  0.000000
4/27/2011	12:56:36 PM	BCl3 MFC set to  0.000000
4/27/2011	12:56:36 PM	PHl3 MFC set to  0.000000
4/27/2011	12:56:36 PM	SiCl4 MFC set to  0.000000
4/27/2011	12:56:36 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	12:56:36 PM	Tube furnace set to 0
4/27/2011	12:57:36 PM	H2 valve closed
4/27/2011	12:57:36 PM	BCl3 valve closed
4/27/2011	12:57:36 PM	PH3 valve closed
4/27/2011	12:57:36 PM	SiCl4 pre valve closed
4/27/2011	12:57:36 PM	SiCl4 post valve closed
4/27/2011	12:57:36 PM	Bubbler valve closed
4/27/2011	12:57:36 PM	Helium valve opened
4/27/2011	12:57:36 PM	Main Vac valve opened
4/27/2011	12:57:36 PM	Bypass valve opened
4/27/2011	12:57:36 PM	Helium MFC set to  100.000000
4/27/2011	12:57:36 PM	H2 MFC set to  0.000000
4/27/2011	12:57:36 PM	BCl3 MFC set to  0.000000
4/27/2011	12:57:36 PM	PHl3 MFC set to  0.000000
4/27/2011	12:57:36 PM	SiCl4 MFC set to  0.000000
4/27/2011	12:57:36 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	12:57:37 PM	Tube furnace set to 0
4/27/2011	12:58:37 PM	Helium valve closed
4/27/2011	12:58:37 PM	H2 valve closed
4/27/2011	12:58:37 PM	BCl3 valve closed
4/27/2011	12:58:37 PM	PH3 valve closed
4/27/2011	12:58:37 PM	SiCl4 pre valve closed
4/27/2011	12:58:37 PM	SiCl4 post valve closed
4/27/2011	12:58:37 PM	Bubbler valve closed
4/27/2011	12:58:37 PM	Main Vac valve opened
4/27/2011	12:58:37 PM	Bypass valve opened
4/27/2011	12:58:37 PM	Helium MFC set to  0.000000
4/27/2011	12:58:37 PM	H2 MFC set to  0.000000
4/27/2011	12:58:37 PM	BCl3 MFC set to  0.000000
4/27/2011	12:58:37 PM	PHl3 MFC set to  0.000000
4/27/2011	12:58:37 PM	SiCl4 MFC set to  0.000000
4/27/2011	12:58:37 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	12:58:37 PM	Tube furnace set to 0
4/27/2011	12:59:37 PM	H2 valve closed
4/27/2011	12:59:37 PM	BCl3 valve closed
4/27/2011	12:59:37 PM	PH3 valve closed
4/27/2011	12:59:37 PM	SiCl4 pre valve closed
4/27/2011	12:59:37 PM	SiCl4 post valve closed
4/27/2011	12:59:37 PM	Bubbler valve closed
4/27/2011	12:59:37 PM	Helium valve opened
4/27/2011	12:59:37 PM	Main Vac valve opened
4/27/2011	12:59:37 PM	Bypass valve opened
4/27/2011	12:59:37 PM	Helium MFC set to  100.000000
4/27/2011	12:59:37 PM	H2 MFC set to  0.000000
4/27/2011	12:59:37 PM	BCl3 MFC set to  0.000000
4/27/2011	12:59:37 PM	PHl3 MFC set to  0.000000
4/27/2011	12:59:37 PM	SiCl4 MFC set to  0.000000
4/27/2011	12:59:37 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	12:59:37 PM	Tube furnace set to 0
4/27/2011	1:00:37 PM	Helium valve closed
4/27/2011	1:00:37 PM	H2 valve closed
4/27/2011	1:00:37 PM	BCl3 valve closed
4/27/2011	1:00:37 PM	PH3 valve closed
4/27/2011	1:00:37 PM	SiCl4 pre valve closed
4/27/2011	1:00:37 PM	SiCl4 post valve closed
4/27/2011	1:00:37 PM	Bubbler valve closed
4/27/2011	1:00:37 PM	Main Vac valve opened
4/27/2011	1:00:37 PM	Bypass valve opened
4/27/2011	1:00:37 PM	Helium MFC set to  0.000000
4/27/2011	1:00:37 PM	H2 MFC set to  0.000000
4/27/2011	1:00:37 PM	BCl3 MFC set to  0.000000
4/27/2011	1:00:37 PM	PHl3 MFC set to  0.000000
4/27/2011	1:00:37 PM	SiCl4 MFC set to  0.000000
4/27/2011	1:00:37 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	1:00:37 PM	Tube furnace set to 0
4/27/2011	1:01:37 PM	H2 valve closed
4/27/2011	1:01:37 PM	BCl3 valve closed
4/27/2011	1:01:37 PM	PH3 valve closed
4/27/2011	1:01:37 PM	SiCl4 pre valve closed
4/27/2011	1:01:37 PM	SiCl4 post valve closed
4/27/2011	1:01:37 PM	Bubbler valve closed
4/27/2011	1:01:37 PM	Helium valve opened
4/27/2011	1:01:37 PM	Main Vac valve opened
4/27/2011	1:01:37 PM	Bypass valve opened
4/27/2011	1:01:37 PM	Helium MFC set to  100.000000
4/27/2011	1:01:37 PM	H2 MFC set to  0.000000
4/27/2011	1:01:37 PM	BCl3 MFC set to  0.000000
4/27/2011	1:01:37 PM	PHl3 MFC set to  0.000000
4/27/2011	1:01:37 PM	SiCl4 MFC set to  0.000000
4/27/2011	1:01:37 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	1:01:37 PM	Tube furnace set to 0
4/27/2011	1:02:37 PM	Helium valve closed
4/27/2011	1:02:37 PM	H2 valve closed
4/27/2011	1:02:37 PM	BCl3 valve closed
4/27/2011	1:02:37 PM	PH3 valve closed
4/27/2011	1:02:37 PM	SiCl4 pre valve closed
4/27/2011	1:02:37 PM	SiCl4 post valve closed
4/27/2011	1:02:37 PM	Bubbler valve closed
4/27/2011	1:02:37 PM	Main Vac valve opened
4/27/2011	1:02:37 PM	Bypass valve opened
4/27/2011	1:02:37 PM	Helium MFC set to  0.000000
4/27/2011	1:02:37 PM	H2 MFC set to  0.000000
4/27/2011	1:02:37 PM	BCl3 MFC set to  0.000000
4/27/2011	1:02:37 PM	PHl3 MFC set to  0.000000
4/27/2011	1:02:37 PM	SiCl4 MFC set to  0.000000
4/27/2011	1:02:37 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	1:02:38 PM	Tube furnace set to 0
4/27/2011	1:02:39 PM	Run finished at 1:02 PM
4/27/2011	1:02:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/27/2011	1:50:49 PM	Recipe started at 1:50 PM
4/27/2011	1:50:49 PM	Helium valve closed
4/27/2011	1:50:49 PM	BCl3 valve closed
4/27/2011	1:50:49 PM	PH3 valve closed
4/27/2011	1:50:49 PM	SiCl4 pre valve closed
4/27/2011	1:50:49 PM	SiCl4 post valve closed
4/27/2011	1:50:49 PM	Main Vac valve closed
4/27/2011	1:50:49 PM	Bypass valve closed
4/27/2011	1:50:49 PM	Bubbler valve closed
4/27/2011	1:50:49 PM	H2 valve opened
4/27/2011	1:50:49 PM	Helium MFC set to  0.000000
4/27/2011	1:50:49 PM	H2 MFC set to  500.000000
4/27/2011	1:50:49 PM	BCl3 MFC set to  0.000000
4/27/2011	1:50:49 PM	PHl3 MFC set to  0.000000
4/27/2011	1:50:49 PM	SiCl4 MFC set to  0.000000
4/27/2011	1:50:49 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	1:50:50 PM	Tube furnace set to 0
4/27/2011	1:52:07 PM	Helium valve closed
4/27/2011	1:52:07 PM	BCl3 valve closed
4/27/2011	1:52:07 PM	PH3 valve closed
4/27/2011	1:52:07 PM	SiCl4 pre valve closed
4/27/2011	1:52:07 PM	SiCl4 post valve closed
4/27/2011	1:52:07 PM	Main Vac valve closed
4/27/2011	1:52:07 PM	Bypass valve closed
4/27/2011	1:52:07 PM	H2 valve opened
4/27/2011	1:52:07 PM	Bubbler valve opened
4/27/2011	1:52:07 PM	Helium MFC set to  0.000000
4/27/2011	1:52:07 PM	H2 MFC set to  500.000000
4/27/2011	1:52:07 PM	BCl3 MFC set to  0.000000
4/27/2011	1:52:07 PM	PHl3 MFC set to  0.000000
4/27/2011	1:52:07 PM	SiCl4 MFC set to  0.000000
4/27/2011	1:52:07 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	1:52:07 PM	Tube furnace set to 1000
4/27/2011	2:12:07 PM	Helium valve closed
4/27/2011	2:12:07 PM	PH3 valve closed
4/27/2011	2:12:07 PM	Main Vac valve closed
4/27/2011	2:12:07 PM	Bypass valve closed
4/27/2011	2:12:07 PM	H2 valve opened
4/27/2011	2:12:07 PM	BCl3 valve opened
4/27/2011	2:12:07 PM	SiCl4 pre valve opened
4/27/2011	2:12:07 PM	SiCl4 post valve opened
4/27/2011	2:12:07 PM	Bubbler valve opened
4/27/2011	2:12:07 PM	Helium MFC set to  0.000000
4/27/2011	2:12:07 PM	H2 MFC set to  500.000000
4/27/2011	2:12:07 PM	BCl3 MFC set to  3.000000
4/27/2011	2:12:07 PM	PHl3 MFC set to  0.000000
4/27/2011	2:12:07 PM	SiCl4 MFC set to  50.000000
4/27/2011	2:12:07 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	2:12:08 PM	Tube furnace set to 1000
4/27/2011	2:27:07 PM	H2 valve closed
4/27/2011	2:27:07 PM	BCl3 valve closed
4/27/2011	2:27:07 PM	PH3 valve closed
4/27/2011	2:27:08 PM	SiCl4 pre valve closed
4/27/2011	2:27:08 PM	SiCl4 post valve closed
4/27/2011	2:27:08 PM	Main Vac valve closed
4/27/2011	2:27:08 PM	Bypass valve closed
4/27/2011	2:27:08 PM	Helium valve opened
4/27/2011	2:27:08 PM	Bubbler valve opened
4/27/2011	2:27:08 PM	Helium MFC set to  500.000000
4/27/2011	2:27:08 PM	H2 MFC set to  0.000000
4/27/2011	2:27:08 PM	BCl3 MFC set to  0.000000
4/27/2011	2:27:08 PM	PHl3 MFC set to  0.000000
4/27/2011	2:27:08 PM	SiCl4 MFC set to  0.000000
4/27/2011	2:27:08 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	2:27:08 PM	Tube furnace set to 0
4/27/2011	2:47:08 PM	Helium valve closed
4/27/2011	2:47:08 PM	H2 valve closed
4/27/2011	2:47:08 PM	BCl3 valve closed
4/27/2011	2:47:08 PM	PH3 valve closed
4/27/2011	2:47:08 PM	SiCl4 pre valve closed
4/27/2011	2:47:08 PM	SiCl4 post valve closed
4/27/2011	2:47:08 PM	Main Vac valve closed
4/27/2011	2:47:08 PM	Bypass valve closed
4/27/2011	2:47:08 PM	Bubbler valve closed
4/27/2011	2:47:08 PM	Helium MFC set to  0.000000
4/27/2011	2:47:08 PM	H2 MFC set to  0.000000
4/27/2011	2:47:08 PM	BCl3 MFC set to  0.000000
4/27/2011	2:47:08 PM	PHl3 MFC set to  0.000000
4/27/2011	2:47:08 PM	SiCl4 MFC set to  0.000000
4/27/2011	2:47:08 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	2:47:08 PM	Tube furnace set to 0
4/27/2011	2:47:08 PM	Run finished at 2:47 PM
4/27/2011	2:52:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/27/2011	2:52:51 PM	Recipe started at 2:52 PM
4/27/2011	2:52:51 PM	Helium valve closed
4/27/2011	2:52:51 PM	H2 valve closed
4/27/2011	2:52:51 PM	BCl3 valve closed
4/27/2011	2:52:51 PM	PH3 valve closed
4/27/2011	2:52:51 PM	SiCl4 pre valve closed
4/27/2011	2:52:51 PM	SiCl4 post valve closed
4/27/2011	2:52:51 PM	Main Vac valve closed
4/27/2011	2:52:51 PM	Bubbler valve closed
4/27/2011	2:52:51 PM	Bypass valve opened
4/27/2011	2:52:51 PM	Helium MFC set to  0.000000
4/27/2011	2:52:51 PM	H2 MFC set to  0.000000
4/27/2011	2:52:51 PM	BCl3 MFC set to  0.000000
4/27/2011	2:52:51 PM	PHl3 MFC set to  0.000000
4/27/2011	2:52:51 PM	SiCl4 MFC set to  0.000000
4/27/2011	2:52:51 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	2:52:51 PM	Tube furnace set to 0
4/27/2011	2:53:24 PM	Helium valve closed
4/27/2011	2:53:24 PM	H2 valve closed
4/27/2011	2:53:24 PM	BCl3 valve closed
4/27/2011	2:53:24 PM	PH3 valve closed
4/27/2011	2:53:24 PM	SiCl4 pre valve closed
4/27/2011	2:53:24 PM	SiCl4 post valve closed
4/27/2011	2:53:24 PM	Bubbler valve closed
4/27/2011	2:53:24 PM	Main Vac valve opened
4/27/2011	2:53:24 PM	Bypass valve opened
4/27/2011	2:53:24 PM	Helium MFC set to  0.000000
4/27/2011	2:53:24 PM	H2 MFC set to  0.000000
4/27/2011	2:53:24 PM	BCl3 MFC set to  0.000000
4/27/2011	2:53:24 PM	PHl3 MFC set to  0.000000
4/27/2011	2:53:24 PM	SiCl4 MFC set to  0.000000
4/27/2011	2:53:24 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	2:53:24 PM	Tube furnace set to 0
4/27/2011	2:54:24 PM	H2 valve closed
4/27/2011	2:54:24 PM	BCl3 valve closed
4/27/2011	2:54:24 PM	PH3 valve closed
4/27/2011	2:54:24 PM	SiCl4 pre valve closed
4/27/2011	2:54:24 PM	SiCl4 post valve closed
4/27/2011	2:54:24 PM	Bubbler valve closed
4/27/2011	2:54:24 PM	Helium valve opened
4/27/2011	2:54:24 PM	Main Vac valve opened
4/27/2011	2:54:24 PM	Bypass valve opened
4/27/2011	2:54:24 PM	Helium MFC set to  100.000000
4/27/2011	2:54:24 PM	H2 MFC set to  0.000000
4/27/2011	2:54:24 PM	BCl3 MFC set to  0.000000
4/27/2011	2:54:24 PM	PHl3 MFC set to  0.000000
4/27/2011	2:54:24 PM	SiCl4 MFC set to  0.000000
4/27/2011	2:54:24 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	2:54:24 PM	Tube furnace set to 0
4/27/2011	2:55:24 PM	Helium valve closed
4/27/2011	2:55:24 PM	H2 valve closed
4/27/2011	2:55:24 PM	BCl3 valve closed
4/27/2011	2:55:24 PM	PH3 valve closed
4/27/2011	2:55:24 PM	SiCl4 pre valve closed
4/27/2011	2:55:24 PM	SiCl4 post valve closed
4/27/2011	2:55:24 PM	Bubbler valve closed
4/27/2011	2:55:24 PM	Main Vac valve opened
4/27/2011	2:55:24 PM	Bypass valve opened
4/27/2011	2:55:24 PM	Helium MFC set to  0.000000
4/27/2011	2:55:24 PM	H2 MFC set to  0.000000
4/27/2011	2:55:24 PM	BCl3 MFC set to  0.000000
4/27/2011	2:55:24 PM	PHl3 MFC set to  0.000000
4/27/2011	2:55:24 PM	SiCl4 MFC set to  0.000000
4/27/2011	2:55:24 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	2:55:24 PM	Tube furnace set to 0
4/27/2011	2:56:24 PM	H2 valve closed
4/27/2011	2:56:24 PM	BCl3 valve closed
4/27/2011	2:56:24 PM	PH3 valve closed
4/27/2011	2:56:24 PM	SiCl4 pre valve closed
4/27/2011	2:56:24 PM	SiCl4 post valve closed
4/27/2011	2:56:24 PM	Bubbler valve closed
4/27/2011	2:56:24 PM	Helium valve opened
4/27/2011	2:56:24 PM	Main Vac valve opened
4/27/2011	2:56:24 PM	Bypass valve opened
4/27/2011	2:56:24 PM	Helium MFC set to  100.000000
4/27/2011	2:56:24 PM	H2 MFC set to  0.000000
4/27/2011	2:56:24 PM	BCl3 MFC set to  0.000000
4/27/2011	2:56:24 PM	PHl3 MFC set to  0.000000
4/27/2011	2:56:24 PM	SiCl4 MFC set to  0.000000
4/27/2011	2:56:24 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	2:56:24 PM	Tube furnace set to 0
4/27/2011	2:57:24 PM	Helium valve closed
4/27/2011	2:57:24 PM	H2 valve closed
4/27/2011	2:57:24 PM	BCl3 valve closed
4/27/2011	2:57:24 PM	PH3 valve closed
4/27/2011	2:57:24 PM	SiCl4 pre valve closed
4/27/2011	2:57:24 PM	SiCl4 post valve closed
4/27/2011	2:57:24 PM	Bubbler valve closed
4/27/2011	2:57:24 PM	Main Vac valve opened
4/27/2011	2:57:24 PM	Bypass valve opened
4/27/2011	2:57:24 PM	Helium MFC set to  0.000000
4/27/2011	2:57:24 PM	H2 MFC set to  0.000000
4/27/2011	2:57:24 PM	BCl3 MFC set to  0.000000
4/27/2011	2:57:24 PM	PHl3 MFC set to  0.000000
4/27/2011	2:57:24 PM	SiCl4 MFC set to  0.000000
4/27/2011	2:57:24 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	2:57:25 PM	Tube furnace set to 0
4/27/2011	2:58:25 PM	H2 valve closed
4/27/2011	2:58:25 PM	BCl3 valve closed
4/27/2011	2:58:25 PM	PH3 valve closed
4/27/2011	2:58:25 PM	SiCl4 pre valve closed
4/27/2011	2:58:25 PM	SiCl4 post valve closed
4/27/2011	2:58:25 PM	Bubbler valve closed
4/27/2011	2:58:25 PM	Helium valve opened
4/27/2011	2:58:25 PM	Main Vac valve opened
4/27/2011	2:58:25 PM	Bypass valve opened
4/27/2011	2:58:25 PM	Helium MFC set to  100.000000
4/27/2011	2:58:25 PM	H2 MFC set to  0.000000
4/27/2011	2:58:25 PM	BCl3 MFC set to  0.000000
4/27/2011	2:58:25 PM	PHl3 MFC set to  0.000000
4/27/2011	2:58:25 PM	SiCl4 MFC set to  0.000000
4/27/2011	2:58:25 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	2:58:25 PM	Tube furnace set to 0
4/27/2011	2:59:25 PM	Helium valve closed
4/27/2011	2:59:25 PM	H2 valve closed
4/27/2011	2:59:25 PM	BCl3 valve closed
4/27/2011	2:59:25 PM	PH3 valve closed
4/27/2011	2:59:25 PM	SiCl4 pre valve closed
4/27/2011	2:59:25 PM	SiCl4 post valve closed
4/27/2011	2:59:25 PM	Bubbler valve closed
4/27/2011	2:59:25 PM	Main Vac valve opened
4/27/2011	2:59:25 PM	Bypass valve opened
4/27/2011	2:59:25 PM	Helium MFC set to  0.000000
4/27/2011	2:59:25 PM	H2 MFC set to  0.000000
4/27/2011	2:59:25 PM	BCl3 MFC set to  0.000000
4/27/2011	2:59:25 PM	PHl3 MFC set to  0.000000
4/27/2011	2:59:25 PM	SiCl4 MFC set to  0.000000
4/27/2011	2:59:25 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	2:59:25 PM	Tube furnace set to 0
4/27/2011	3:00:25 PM	H2 valve closed
4/27/2011	3:00:25 PM	BCl3 valve closed
4/27/2011	3:00:25 PM	PH3 valve closed
4/27/2011	3:00:25 PM	SiCl4 pre valve closed
4/27/2011	3:00:25 PM	SiCl4 post valve closed
4/27/2011	3:00:25 PM	Bubbler valve closed
4/27/2011	3:00:25 PM	Helium valve opened
4/27/2011	3:00:25 PM	Main Vac valve opened
4/27/2011	3:00:25 PM	Bypass valve opened
4/27/2011	3:00:25 PM	Helium MFC set to  100.000000
4/27/2011	3:00:25 PM	H2 MFC set to  0.000000
4/27/2011	3:00:25 PM	BCl3 MFC set to  0.000000
4/27/2011	3:00:25 PM	PHl3 MFC set to  0.000000
4/27/2011	3:00:25 PM	SiCl4 MFC set to  0.000000
4/27/2011	3:00:25 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	3:00:25 PM	Tube furnace set to 0
4/27/2011	3:01:25 PM	Helium valve closed
4/27/2011	3:01:25 PM	H2 valve closed
4/27/2011	3:01:25 PM	BCl3 valve closed
4/27/2011	3:01:25 PM	PH3 valve closed
4/27/2011	3:01:25 PM	SiCl4 pre valve closed
4/27/2011	3:01:25 PM	SiCl4 post valve closed
4/27/2011	3:01:25 PM	Bubbler valve closed
4/27/2011	3:01:25 PM	Main Vac valve opened
4/27/2011	3:01:25 PM	Bypass valve opened
4/27/2011	3:01:25 PM	Helium MFC set to  0.000000
4/27/2011	3:01:25 PM	H2 MFC set to  0.000000
4/27/2011	3:01:25 PM	BCl3 MFC set to  0.000000
4/27/2011	3:01:25 PM	PHl3 MFC set to  0.000000
4/27/2011	3:01:25 PM	SiCl4 MFC set to  0.000000
4/27/2011	3:01:25 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	3:01:25 PM	Tube furnace set to 0
4/27/2011	3:02:25 PM	H2 valve closed
4/27/2011	3:02:25 PM	BCl3 valve closed
4/27/2011	3:02:25 PM	PH3 valve closed
4/27/2011	3:02:25 PM	SiCl4 pre valve closed
4/27/2011	3:02:25 PM	SiCl4 post valve closed
4/27/2011	3:02:25 PM	Bubbler valve closed
4/27/2011	3:02:25 PM	Helium valve opened
4/27/2011	3:02:25 PM	Main Vac valve opened
4/27/2011	3:02:25 PM	Bypass valve opened
4/27/2011	3:02:25 PM	Helium MFC set to  100.000000
4/27/2011	3:02:25 PM	H2 MFC set to  0.000000
4/27/2011	3:02:25 PM	BCl3 MFC set to  0.000000
4/27/2011	3:02:25 PM	PHl3 MFC set to  0.000000
4/27/2011	3:02:25 PM	SiCl4 MFC set to  0.000000
4/27/2011	3:02:25 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	3:02:26 PM	Tube furnace set to 0
4/27/2011	3:03:26 PM	Helium valve closed
4/27/2011	3:03:26 PM	H2 valve closed
4/27/2011	3:03:26 PM	BCl3 valve closed
4/27/2011	3:03:26 PM	PH3 valve closed
4/27/2011	3:03:26 PM	SiCl4 pre valve closed
4/27/2011	3:03:26 PM	SiCl4 post valve closed
4/27/2011	3:03:26 PM	Bubbler valve closed
4/27/2011	3:03:26 PM	Main Vac valve opened
4/27/2011	3:03:26 PM	Bypass valve opened
4/27/2011	3:03:26 PM	Helium MFC set to  0.000000
4/27/2011	3:03:26 PM	H2 MFC set to  0.000000
4/27/2011	3:03:26 PM	BCl3 MFC set to  0.000000
4/27/2011	3:03:26 PM	PHl3 MFC set to  0.000000
4/27/2011	3:03:26 PM	SiCl4 MFC set to  0.000000
4/27/2011	3:03:26 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	3:03:26 PM	Tube furnace set to 0
4/27/2011	3:04:26 PM	H2 valve closed
4/27/2011	3:04:26 PM	BCl3 valve closed
4/27/2011	3:04:26 PM	PH3 valve closed
4/27/2011	3:04:26 PM	SiCl4 pre valve closed
4/27/2011	3:04:26 PM	SiCl4 post valve closed
4/27/2011	3:04:26 PM	Bubbler valve closed
4/27/2011	3:04:26 PM	Helium valve opened
4/27/2011	3:04:26 PM	Main Vac valve opened
4/27/2011	3:04:26 PM	Bypass valve opened
4/27/2011	3:04:26 PM	Helium MFC set to  100.000000
4/27/2011	3:04:26 PM	H2 MFC set to  0.000000
4/27/2011	3:04:26 PM	BCl3 MFC set to  0.000000
4/27/2011	3:04:26 PM	PHl3 MFC set to  0.000000
4/27/2011	3:04:26 PM	SiCl4 MFC set to  0.000000
4/27/2011	3:04:26 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	3:04:26 PM	Tube furnace set to 0
4/27/2011	3:05:26 PM	Helium valve closed
4/27/2011	3:05:26 PM	H2 valve closed
4/27/2011	3:05:26 PM	BCl3 valve closed
4/27/2011	3:05:26 PM	PH3 valve closed
4/27/2011	3:05:26 PM	SiCl4 pre valve closed
4/27/2011	3:05:26 PM	SiCl4 post valve closed
4/27/2011	3:05:26 PM	Bubbler valve closed
4/27/2011	3:05:26 PM	Main Vac valve opened
4/27/2011	3:05:26 PM	Bypass valve opened
4/27/2011	3:05:26 PM	Helium MFC set to  0.000000
4/27/2011	3:05:26 PM	H2 MFC set to  0.000000
4/27/2011	3:05:26 PM	BCl3 MFC set to  0.000000
4/27/2011	3:05:26 PM	PHl3 MFC set to  0.000000
4/27/2011	3:05:26 PM	SiCl4 MFC set to  0.000000
4/27/2011	3:05:26 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	3:05:26 PM	Tube furnace set to 0
4/27/2011	3:06:26 PM	H2 valve closed
4/27/2011	3:06:26 PM	BCl3 valve closed
4/27/2011	3:06:26 PM	PH3 valve closed
4/27/2011	3:06:26 PM	SiCl4 pre valve closed
4/27/2011	3:06:26 PM	SiCl4 post valve closed
4/27/2011	3:06:26 PM	Bubbler valve closed
4/27/2011	3:06:26 PM	Helium valve opened
4/27/2011	3:06:26 PM	Main Vac valve opened
4/27/2011	3:06:26 PM	Bypass valve opened
4/27/2011	3:06:26 PM	Helium MFC set to  100.000000
4/27/2011	3:06:26 PM	H2 MFC set to  0.000000
4/27/2011	3:06:26 PM	BCl3 MFC set to  0.000000
4/27/2011	3:06:26 PM	PHl3 MFC set to  0.000000
4/27/2011	3:06:26 PM	SiCl4 MFC set to  0.000000
4/27/2011	3:06:26 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	3:06:26 PM	Tube furnace set to 0
4/27/2011	3:07:26 PM	Helium valve closed
4/27/2011	3:07:26 PM	H2 valve closed
4/27/2011	3:07:26 PM	BCl3 valve closed
4/27/2011	3:07:26 PM	PH3 valve closed
4/27/2011	3:07:26 PM	SiCl4 pre valve closed
4/27/2011	3:07:26 PM	SiCl4 post valve closed
4/27/2011	3:07:26 PM	Bubbler valve closed
4/27/2011	3:07:26 PM	Main Vac valve opened
4/27/2011	3:07:26 PM	Bypass valve opened
4/27/2011	3:07:26 PM	Helium MFC set to  0.000000
4/27/2011	3:07:26 PM	H2 MFC set to  0.000000
4/27/2011	3:07:26 PM	BCl3 MFC set to  0.000000
4/27/2011	3:07:26 PM	PHl3 MFC set to  0.000000
4/27/2011	3:07:26 PM	SiCl4 MFC set to  0.000000
4/27/2011	3:07:26 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	3:07:27 PM	Tube furnace set to 0
4/27/2011	3:08:27 PM	H2 valve closed
4/27/2011	3:08:27 PM	BCl3 valve closed
4/27/2011	3:08:27 PM	PH3 valve closed
4/27/2011	3:08:27 PM	SiCl4 pre valve closed
4/27/2011	3:08:27 PM	SiCl4 post valve closed
4/27/2011	3:08:27 PM	Bubbler valve closed
4/27/2011	3:08:27 PM	Helium valve opened
4/27/2011	3:08:27 PM	Main Vac valve opened
4/27/2011	3:08:27 PM	Bypass valve opened
4/27/2011	3:08:27 PM	Helium MFC set to  100.000000
4/27/2011	3:08:27 PM	H2 MFC set to  0.000000
4/27/2011	3:08:27 PM	BCl3 MFC set to  0.000000
4/27/2011	3:08:27 PM	PHl3 MFC set to  0.000000
4/27/2011	3:08:27 PM	SiCl4 MFC set to  0.000000
4/27/2011	3:08:27 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	3:08:27 PM	Tube furnace set to 0
4/27/2011	3:09:27 PM	Helium valve closed
4/27/2011	3:09:27 PM	H2 valve closed
4/27/2011	3:09:27 PM	BCl3 valve closed
4/27/2011	3:09:27 PM	PH3 valve closed
4/27/2011	3:09:27 PM	SiCl4 pre valve closed
4/27/2011	3:09:27 PM	SiCl4 post valve closed
4/27/2011	3:09:27 PM	Bubbler valve closed
4/27/2011	3:09:27 PM	Main Vac valve opened
4/27/2011	3:09:27 PM	Bypass valve opened
4/27/2011	3:09:27 PM	Helium MFC set to  0.000000
4/27/2011	3:09:27 PM	H2 MFC set to  0.000000
4/27/2011	3:09:27 PM	BCl3 MFC set to  0.000000
4/27/2011	3:09:27 PM	PHl3 MFC set to  0.000000
4/27/2011	3:09:27 PM	SiCl4 MFC set to  0.000000
4/27/2011	3:09:27 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	3:09:27 PM	Tube furnace set to 0
4/27/2011	3:10:27 PM	H2 valve closed
4/27/2011	3:10:27 PM	BCl3 valve closed
4/27/2011	3:10:27 PM	PH3 valve closed
4/27/2011	3:10:27 PM	SiCl4 pre valve closed
4/27/2011	3:10:27 PM	SiCl4 post valve closed
4/27/2011	3:10:27 PM	Bubbler valve closed
4/27/2011	3:10:27 PM	Helium valve opened
4/27/2011	3:10:27 PM	Main Vac valve opened
4/27/2011	3:10:27 PM	Bypass valve opened
4/27/2011	3:10:27 PM	Helium MFC set to  100.000000
4/27/2011	3:10:27 PM	H2 MFC set to  0.000000
4/27/2011	3:10:27 PM	BCl3 MFC set to  0.000000
4/27/2011	3:10:27 PM	PHl3 MFC set to  0.000000
4/27/2011	3:10:27 PM	SiCl4 MFC set to  0.000000
4/27/2011	3:10:27 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	3:10:27 PM	Tube furnace set to 0
4/27/2011	3:11:27 PM	Helium valve closed
4/27/2011	3:11:27 PM	H2 valve closed
4/27/2011	3:11:27 PM	BCl3 valve closed
4/27/2011	3:11:27 PM	PH3 valve closed
4/27/2011	3:11:27 PM	SiCl4 pre valve closed
4/27/2011	3:11:27 PM	SiCl4 post valve closed
4/27/2011	3:11:27 PM	Bubbler valve closed
4/27/2011	3:11:27 PM	Main Vac valve opened
4/27/2011	3:11:27 PM	Bypass valve opened
4/27/2011	3:11:27 PM	Helium MFC set to  0.000000
4/27/2011	3:11:27 PM	H2 MFC set to  0.000000
4/27/2011	3:11:27 PM	BCl3 MFC set to  0.000000
4/27/2011	3:11:27 PM	PHl3 MFC set to  0.000000
4/27/2011	3:11:27 PM	SiCl4 MFC set to  0.000000
4/27/2011	3:11:27 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	3:11:27 PM	Tube furnace set to 0
4/27/2011	3:12:27 PM	H2 valve closed
4/27/2011	3:12:27 PM	BCl3 valve closed
4/27/2011	3:12:27 PM	PH3 valve closed
4/27/2011	3:12:27 PM	SiCl4 pre valve closed
4/27/2011	3:12:27 PM	SiCl4 post valve closed
4/27/2011	3:12:27 PM	Bubbler valve closed
4/27/2011	3:12:27 PM	Helium valve opened
4/27/2011	3:12:27 PM	Main Vac valve opened
4/27/2011	3:12:27 PM	Bypass valve opened
4/27/2011	3:12:27 PM	Helium MFC set to  100.000000
4/27/2011	3:12:27 PM	H2 MFC set to  0.000000
4/27/2011	3:12:27 PM	BCl3 MFC set to  0.000000
4/27/2011	3:12:27 PM	PHl3 MFC set to  0.000000
4/27/2011	3:12:27 PM	SiCl4 MFC set to  0.000000
4/27/2011	3:12:27 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	3:12:28 PM	Tube furnace set to 0
4/27/2011	3:13:28 PM	Helium valve closed
4/27/2011	3:13:28 PM	H2 valve closed
4/27/2011	3:13:28 PM	BCl3 valve closed
4/27/2011	3:13:28 PM	PH3 valve closed
4/27/2011	3:13:28 PM	SiCl4 pre valve closed
4/27/2011	3:13:28 PM	SiCl4 post valve closed
4/27/2011	3:13:28 PM	Bubbler valve closed
4/27/2011	3:13:28 PM	Main Vac valve opened
4/27/2011	3:13:28 PM	Bypass valve opened
4/27/2011	3:13:28 PM	Helium MFC set to  0.000000
4/27/2011	3:13:28 PM	H2 MFC set to  0.000000
4/27/2011	3:13:28 PM	BCl3 MFC set to  0.000000
4/27/2011	3:13:28 PM	PHl3 MFC set to  0.000000
4/27/2011	3:13:28 PM	SiCl4 MFC set to  0.000000
4/27/2011	3:13:28 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	3:13:28 PM	Tube furnace set to 0
4/27/2011	3:13:29 PM	Run finished at 3:13 PM
4/27/2011	3:13:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/27/2011	3:38:00 PM	Recipe started at 3:37 PM
4/27/2011	3:38:00 PM	Helium valve closed
4/27/2011	3:38:00 PM	BCl3 valve closed
4/27/2011	3:38:00 PM	PH3 valve closed
4/27/2011	3:38:00 PM	SiCl4 pre valve closed
4/27/2011	3:38:00 PM	SiCl4 post valve closed
4/27/2011	3:38:00 PM	Main Vac valve closed
4/27/2011	3:38:00 PM	Bypass valve closed
4/27/2011	3:38:00 PM	Bubbler valve closed
4/27/2011	3:38:00 PM	H2 valve opened
4/27/2011	3:38:00 PM	Helium MFC set to  0.000000
4/27/2011	3:38:00 PM	H2 MFC set to  500.000000
4/27/2011	3:38:00 PM	BCl3 MFC set to  0.000000
4/27/2011	3:38:00 PM	PHl3 MFC set to  0.000000
4/27/2011	3:38:00 PM	SiCl4 MFC set to  0.000000
4/27/2011	3:38:00 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	3:38:00 PM	Tube furnace set to 0
4/27/2011	3:39:17 PM	Helium valve closed
4/27/2011	3:39:17 PM	BCl3 valve closed
4/27/2011	3:39:17 PM	PH3 valve closed
4/27/2011	3:39:17 PM	SiCl4 pre valve closed
4/27/2011	3:39:17 PM	SiCl4 post valve closed
4/27/2011	3:39:17 PM	Main Vac valve closed
4/27/2011	3:39:17 PM	Bypass valve closed
4/27/2011	3:39:17 PM	H2 valve opened
4/27/2011	3:39:17 PM	Bubbler valve opened
4/27/2011	3:39:17 PM	Helium MFC set to  0.000000
4/27/2011	3:39:17 PM	H2 MFC set to  500.000000
4/27/2011	3:39:17 PM	BCl3 MFC set to  0.000000
4/27/2011	3:39:17 PM	PHl3 MFC set to  0.000000
4/27/2011	3:39:17 PM	SiCl4 MFC set to  0.000000
4/27/2011	3:39:17 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	3:39:17 PM	Tube furnace set to 1000
4/27/2011	3:59:17 PM	Helium valve closed
4/27/2011	3:59:17 PM	PH3 valve closed
4/27/2011	3:59:17 PM	Main Vac valve closed
4/27/2011	3:59:17 PM	Bypass valve closed
4/27/2011	3:59:17 PM	H2 valve opened
4/27/2011	3:59:17 PM	BCl3 valve opened
4/27/2011	3:59:17 PM	SiCl4 pre valve opened
4/27/2011	3:59:17 PM	SiCl4 post valve opened
4/27/2011	3:59:17 PM	Bubbler valve opened
4/27/2011	3:59:17 PM	Helium MFC set to  0.000000
4/27/2011	3:59:17 PM	H2 MFC set to  500.000000
4/27/2011	3:59:17 PM	BCl3 MFC set to  3.000000
4/27/2011	3:59:17 PM	PHl3 MFC set to  0.000000
4/27/2011	3:59:17 PM	SiCl4 MFC set to  50.000000
4/27/2011	3:59:17 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	3:59:17 PM	Tube furnace set to 1000
4/27/2011	4:14:17 PM	H2 valve closed
4/27/2011	4:14:17 PM	BCl3 valve closed
4/27/2011	4:14:17 PM	PH3 valve closed
4/27/2011	4:14:17 PM	SiCl4 pre valve closed
4/27/2011	4:14:17 PM	SiCl4 post valve closed
4/27/2011	4:14:17 PM	Main Vac valve closed
4/27/2011	4:14:17 PM	Bypass valve closed
4/27/2011	4:14:17 PM	Helium valve opened
4/27/2011	4:14:17 PM	Bubbler valve opened
4/27/2011	4:14:17 PM	Helium MFC set to  500.000000
4/27/2011	4:14:17 PM	H2 MFC set to  0.000000
4/27/2011	4:14:17 PM	BCl3 MFC set to  0.000000
4/27/2011	4:14:17 PM	PHl3 MFC set to  0.000000
4/27/2011	4:14:17 PM	SiCl4 MFC set to  0.000000
4/27/2011	4:14:17 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	4:14:17 PM	Tube furnace set to 0
4/27/2011	4:34:17 PM	Helium valve closed
4/27/2011	4:34:17 PM	H2 valve closed
4/27/2011	4:34:17 PM	BCl3 valve closed
4/27/2011	4:34:17 PM	PH3 valve closed
4/27/2011	4:34:17 PM	SiCl4 pre valve closed
4/27/2011	4:34:17 PM	SiCl4 post valve closed
4/27/2011	4:34:17 PM	Main Vac valve closed
4/27/2011	4:34:17 PM	Bypass valve closed
4/27/2011	4:34:17 PM	Bubbler valve closed
4/27/2011	4:34:17 PM	Helium MFC set to  0.000000
4/27/2011	4:34:17 PM	H2 MFC set to  0.000000
4/27/2011	4:34:17 PM	BCl3 MFC set to  0.000000
4/27/2011	4:34:17 PM	PHl3 MFC set to  0.000000
4/27/2011	4:34:17 PM	SiCl4 MFC set to  0.000000
4/27/2011	4:34:17 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	4:34:17 PM	Tube furnace set to 0
4/27/2011	4:34:18 PM	Run finished at 4:34 PM
4/27/2011	4:40:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/27/2011	4:40:48 PM	Recipe started at 4:40 PM
4/27/2011	4:40:48 PM	H2 valve closed
4/27/2011	4:40:48 PM	BCl3 valve closed
4/27/2011	4:40:48 PM	PH3 valve closed
4/27/2011	4:40:48 PM	SiCl4 pre valve closed
4/27/2011	4:40:48 PM	SiCl4 post valve closed
4/27/2011	4:40:48 PM	Main Vac valve closed
4/27/2011	4:40:48 PM	Bypass valve closed
4/27/2011	4:40:48 PM	Bubbler valve closed
4/27/2011	4:40:48 PM	Helium valve opened
4/27/2011	4:40:48 PM	Helium MFC set to  500.000000
4/27/2011	4:40:48 PM	H2 MFC set to  0.000000
4/27/2011	4:40:48 PM	BCl3 MFC set to  0.000000
4/27/2011	4:40:48 PM	PHl3 MFC set to  0.000000
4/27/2011	4:40:48 PM	SiCl4 MFC set to  0.000000
4/27/2011	4:40:48 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	4:40:48 PM	Tube furnace set to 0
4/27/2011	4:40:51 PM	Helium valve closed
4/27/2011	4:40:51 PM	H2 valve closed
4/27/2011	4:40:51 PM	BCl3 valve closed
4/27/2011	4:40:51 PM	PH3 valve closed
4/27/2011	4:40:51 PM	SiCl4 pre valve closed
4/27/2011	4:40:51 PM	SiCl4 post valve closed
4/27/2011	4:40:51 PM	Main Vac valve closed
4/27/2011	4:40:51 PM	Bypass valve closed
4/27/2011	4:40:51 PM	Bubbler valve closed
4/27/2011	4:40:51 PM	Helium MFC set to  0.000000
4/27/2011	4:40:51 PM	H2 MFC set to  0.000000
4/27/2011	4:40:51 PM	BCl3 MFC set to  0.000000
4/27/2011	4:40:51 PM	PHl3 MFC set to  0.000000
4/27/2011	4:40:51 PM	SiCl4 MFC set to  0.000000
4/27/2011	4:40:51 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	4:40:51 PM	Tube furnace set to 0
4/27/2011	4:40:51 PM	Run finished at 4:40 PM
4/27/2011	4:40:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/27/2011	4:46:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/27/2011	4:46:29 PM	Recipe started at 4:46 PM
4/27/2011	4:46:29 PM	Helium valve closed
4/27/2011	4:46:29 PM	H2 valve closed
4/27/2011	4:46:29 PM	BCl3 valve closed
4/27/2011	4:46:29 PM	PH3 valve closed
4/27/2011	4:46:29 PM	SiCl4 pre valve closed
4/27/2011	4:46:29 PM	SiCl4 post valve closed
4/27/2011	4:46:29 PM	Main Vac valve closed
4/27/2011	4:46:29 PM	Bubbler valve closed
4/27/2011	4:46:29 PM	Bypass valve opened
4/27/2011	4:46:29 PM	Helium MFC set to  0.000000
4/27/2011	4:46:29 PM	H2 MFC set to  0.000000
4/27/2011	4:46:29 PM	BCl3 MFC set to  0.000000
4/27/2011	4:46:29 PM	PHl3 MFC set to  0.000000
4/27/2011	4:46:29 PM	SiCl4 MFC set to  0.000000
4/27/2011	4:46:29 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	4:46:29 PM	Tube furnace set to 0
4/27/2011	4:47:02 PM	Helium valve closed
4/27/2011	4:47:02 PM	H2 valve closed
4/27/2011	4:47:02 PM	BCl3 valve closed
4/27/2011	4:47:02 PM	PH3 valve closed
4/27/2011	4:47:02 PM	SiCl4 pre valve closed
4/27/2011	4:47:02 PM	SiCl4 post valve closed
4/27/2011	4:47:02 PM	Bubbler valve closed
4/27/2011	4:47:02 PM	Main Vac valve opened
4/27/2011	4:47:02 PM	Bypass valve opened
4/27/2011	4:47:02 PM	Helium MFC set to  0.000000
4/27/2011	4:47:02 PM	H2 MFC set to  0.000000
4/27/2011	4:47:02 PM	BCl3 MFC set to  0.000000
4/27/2011	4:47:02 PM	PHl3 MFC set to  0.000000
4/27/2011	4:47:02 PM	SiCl4 MFC set to  0.000000
4/27/2011	4:47:02 PM	Bypass solenoid MFC set to  0.000000
4/27/2011	4:47:03 PM	Tube furnace set to 0
4/27/2011	4:47:03 PM	Run finished at 4:47 PM
4/27/2011	4:47:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
